Efficient Picosecond Laser Lift-Off of Copper Oxide from Copper: Optimal Fluence and Focusing Conditions for Maximum Delamination Area

The laser-induced lift-off of functional surface layers is a key process in micro- and nano-fabrication; however, optimization criteria for maximizing the lifted-off area remain insufficiently defined. In analogy to the well-established theory of efficient laser ablation, where the maximum ablated volume per pulse is achieved at a peak fluence of F0opt=e2Fth, we develop a theoretical framework for efficient laser lift-off driven by Gaussian beams. The main highlight of this work is the derivation of a new analytical equation for the maximum delaminated area, enabling the straightforward determination of optimal processing conditions. By analytically describing the lift-off area as a function of peak fluence, beam radius, and focus position, we demonstrate that the maximum lifted-off area is achieved at a substantially lower optimal fluence, namely F0opt=e1Fth. Closed-form expressions for the optimal beam radius, maximal lift-off area, and optimal focus position are derived and validated by numerical modeling. The theory is applied to the picosecond laser lift-off of copper oxide from copper, showing excellent agreement between experimental observations and model predictions. The results reveal fundamental differences between ablation- and lift-off-dominated material removal and provide practical guidelines for maximizing process efficiency in laser-assisted delamination, selective coating removal, and surface functionalization.