Positioning of Nanoscale Materials in TEM: A Method Based on Image Comparison in a Specific Micro-Domain

In the field of material micro-/nano-analysis, the lack of an efficient method for characterizing the same microregion has been an obstacle in scientific research. This not only severely affects the efficiency and depth of academic communication, but also creates loopholes for data manipulation. To address these challenges, it is essential to develop microscale repositioning techniques to achieve repeatable characterization. However, microscale localization techniques based on Transmission Electron Microscopy (TEM) remain underdeveloped, facing issues such as poor localization accuracy, high costs, and cumbersome procedures in practical applications. This paper proposes a positioning method for nanoscale samples that utilizes coordinate grids and artificially added micron-scale markers as references. Accurate localization and retrieval of micro- and nanoscale targets in TEM were achieved using a confined comparison approach. This method is simple, cost-effective, and universally applicable to Inter-instrument correlative operation, enabling repeated characterization of the same microregion. It is also effective in Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). By enhancing the integration efficiency between TEM, SEM, and AFM, this method will yield more meaningful data and address challenges such as target localization difficulties and poor data reproducibility. It will mitigate issues related to data fabrication and experimental irreproducibility, thereby offering technical support for the smooth progress of research and academic exchange activities.