Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror
Source abstract
Abstract
A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3 m in diameter and 13.6 m in the radius of curvature. The preliminary experimental result indicates that the error of surface measurement is 0.8 μm (RMS).
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Research context
OpenAlex topics: Advanced Measurement and Metrology Techniques · Surface Roughness and Optical Measurements · Optical measurement and interference techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
University of Chinese Academy of Sciences, Beijing 100049, China
Funding
National Science Foundation of China
References (14)
Show source-provided references
1. Advances in optical engineering for future telescopes10.29026/oea.2021.210040 ↗
2. Burge, J.H. (1993). Advanced Techniques for Measuring Primary Mirrors for Astronomical Telescopes. [Ph.D. Thesis, University of Arizona].
3. Overview of advanced manufacturing technology of large-aperture aspheric mirror
4. Measuring technique for off-axis aspherical mirror in fine grinding process using coordinate measurement machine10.3788/HPLPB20122411.2665 ↗
5. Swing arm optical coordinate-measuring machine: High precision measuring ground aspheric surfaces using a laser triangulation probe10.1117/1.OE.51.7.073603 ↗
6. Measuring the radius of curvature of a spherical mirror with an interferometer and a laser tracker10.1117/1.2047594 ↗
7. Li, J., Yan, F.T., Chen, L., Yang, J., and Wan, Y.J. (2019). Measurement Vertex Position of a Large Aspheric Mirror. Appl. Sci., 9.10.3390/app9061038 ↗
8. Measurement of influence function using swing arm profilometer and laser tracker10.1364/OE.18.005271 ↗
9. Optical testing of the LSST combined primary/tertiary mirror
10. (2022, September 23). Available online: https://apimetrology.com/smr/.
11. Flatness measurement of large flat with two-station laser trackers10.1080/15599612.2018.1529846 ↗
12. Measurements of large optical surfaces with a laser tracker
13. Fast and accurate measurement of large optical surfaces before polishing using a laser tracker10.3788/COL201311.091202 ↗
14. Accuracy of laser tracker measurements of the GMT 8.4-m off-axis mirror segments