YAG Laser Rod 3D Corrective Process Optimization through Tool Influent Function Shape Inspection

Due to the increasing demands on the quality of solid-state laser active media production based on yttrium aluminum garnet Y3Al5O12 in the form of rods with precisely machined faces, the possibilities of applying subaperture 3D corrective polishing in this segment of optical production were studied. For the considered laser rod diameters of up to 10 mm, the corrective process had to be optimized to achieve a stable, suitably shaped tool influence function at the full width at half maximum of approximately 1.5 mm, enabling 3D shape corrections with sufficient lateral resolution. For this purpose, a number of experiments were performed using both tools based on a flexible elastic membrane inflated by compressed air and tools with a viscoelastic head, and the effect of the tool-polished surface interaction was studied and analyzed.