A Polishing Processes Optimization Method for Ring-Pendulum Double-Sided Polisher
Source abstract
Abstract
This paper presents an optimization method that aims to mitigate disturbances in the radial-feed system of the ring-pendulum double-sided polisher (RDP) during processing. We built a radial-feed system model of an RDP and developed a single-tube robust model predictive control system to enhance the disturbance rejection capability of the radial-feed system. To constrain the system states inside the terminal constraint set and further enhance the system’s robustness, we added the ε-approximation to approach the single-tube terminal constraint set. Finally, the effectiveness of the proposed method for the RDP radial-feed system was verified through simulations and experiments. These findings demonstrate the potential of the proposed method for improving the performance of the RDP radial-feed system in practical applications. The polish processing results demonstrated a substantial improvement in the accuracy of the surface shape measurements obtained by applying the STRMPC method. Compared to the MPC method, the PV value decreased from 1.49 λ PV to 0.99 λ PV, indicating an improvement in the convergence rate of approximately 9.78%. Additionally, the RMS value decreased from 0.257 λ RMS to 0.163 λ RMS, demonstrating a remarkable 35.6% enhancement in the convergence rate.
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Advanced machining processes and optimization · Iterative Learning Control Systems
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Electronic and Information Engineering, Changchun University of Science and Technology, Changchun 130022, China
Xi’an Key Laboratory of Active Photoelectric Imaging Detection Technology, Xi’an Technological University, Xi’an 710021, China
School of Optoelectronic Engineering, Xi’an Technological University, Xi’an 710021, China
School of Information and Control Engineering, Jilin Institute of Chemical Technology, Jilin 132022, China
Funding
Equipment Advance Research Field Foundation
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