Fabrication and Characterization of Gel-Forming Cr2O3 Abrasive Tools for Sapphire Substrate Polishing
Source abstract
Abstract
This paper proposes a gel-formed abrasive tool to address the problem of abrasive agglomeration in a traditional hot-pressing abrasive tool. The effect of Polyimide resin content on the mechanical properties of the gel abrasive tools were tested, and a comparison of the mechanical properties of the gel abrasive tool and the hot-pressing tool was conducted. An orthogonal experiment was conducted to explore the best combination of machining parameters. A polishing experiment of sapphire was conducted to compare the processing effect of the gel abrasive tool and hot-pressing tool. The results from testing the mechanical properties showed that the tensile, flexural, and impact strength of the gel abrasive tool was better than that of the hot-pressing abrasive tool. The results of the orthogonal experiment showed that the best process parameters of the gel abrasive tool were a spindle speed of 900 rpm, a feed rate of 8 μm/min, and a grinding depth of 16 μm. The polishing experiment showed that the gel abrasive tool had a better processing effect on sapphire. The sapphire surface processed by the gel abrasive tool had no deep scratches, and an ultrasmooth surface could be obtained after chemical mechanical polishing (CMP).
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Advanced machining processes and optimization · Tunneling and Rock Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
College of Mechanical Engineering, Quzhou University, Quzhou 324000, China
Ultra-Precision Machining Centre, Zhejiang University of Technology, Hangzhou 310014, China
Key Laboratory of Air-Driven Equipment Technology of Zhejiang Province, Quzhou University, Quzhou 324000, China
Funding
Natural Science Foundation of Zhejiang Province · Quzhou Science and Technology Project
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