Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
Source abstract
Abstract
Vibration in ultra-precision machining is an inherent physical phenomenon and a key factor affecting surface generation. However, the influence of the vibration characteristics of aerostatic guideways on the machining morphology has not been fully studied. In this article, a diamond micro-planing experiment was carried out on an oxygen-free copper workpiece using a homemade three-axis machine tool, and a white-light interferometer was used to measure the surface topography of the planing surface. The power spectral density of the surface topography was analyzed, and the spatial wavelength components of the surface topography were extracted. Then, the vibration characteristics of the aerostatic guideway were measured in both the space domain and the time domain. A comprehensive analysis of the main components of the workpiece surface error morphology and the vibration characteristics of the guideway shows that the time-domain vibration of the aerostatic guideway is the main factor causing the surface topography error of the workpiece.
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Research context
OpenAlex topics: Tribology and Lubrication Engineering · Advanced Surface Polishing Techniques · Advanced Measurement and Metrology Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China
Guangdong Provincial Key Laboratory for Micro-Nano Manufacturing Technology and Equipment, School of Electro-Mechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China
Funding
Science and Technology Program of Guangzhou, China · National Natural Science Foundation of China
References (16)
Show source-provided references
1. Review on diamond-machining processes for the generation of functional surface structures10.1016/j.cirpj.2011.10.003 ↗
2. Dynamic long axis for ultra-precision machining of optical linear structures10.1007/s11740-007-0050-8 ↗
3. 6-Axis control ultraprecision microgrooving on sculptured surfaces with non-rotational cutting tool10.1016/j.cirp.2009.03.124 ↗
4. Characterisation of nanosurface generation in single-point diamond turning10.1016/S0890-6955(00)00102-4 ↗
5. The effects of machining process variables and tooling characterisation on the surface generation10.1007/s00170-003-1943-0 ↗
6. Microscopic topographical analysis of tool vibration effects on diamond turned optical surfaces10.1016/S0141-6359(01)00115-5 ↗
7. Improvement of Machining Accuracy of 5-Axis Control Ultraprecision Machining by Means of Laminarization and Mirror Surface Finishing10.1016/S0007-8506(07)60115-2 ↗
8. Clarifications of the mechanism of nano-fluctuation of aerostatic thrust bearing with surface restriction10.1016/j.triboint.2011.03.030 ↗
9. The design of aerostatic bearings for application to nanometre resolution manufacturing machine systems10.1016/S0301-679X(00)00118-3 ↗
10. A hybrid approach to the numerical solution of air flow field in aerostatic thrust bearings10.1016/j.triboint.2016.04.002 ↗
11. Modeling for optimization of circular flat pad aerostatic bearing with a single central orifice-type restrictor based on CFD simulation10.1016/j.triboint.2016.12.044 ↗
12. Numerical and Experimental Analysis for the Small Vibration of Aerostatic Guideways10.1016/S0007-8506(07)60449-1 ↗
13. Design of the aerostatic linear guideway with a passive disk-spring compensator for PCB drilling machine10.1016/j.triboint.2009.07.001 ↗
14. Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores10.1016/j.cirp.2009.03.107 ↗
15. Large eddy simulation of vortex shedding and pressure fluctuation in aerostatic bearings10.1016/j.jfluidstructs.2013.03.012 ↗
16. A theoretical and experimental investigation into five-DOF dynamic characteristics of an aerostatic bearing spindle in ultra-precision diamond turning10.1016/j.ijmachtools.2013.03.001 ↗