Detachment Energy Evaluation in Nano-Particle Cleaning Using Lateral Force Microscopy
Source abstract
Abstract
It has been difficult to detach abrasive particles smaller than 50 nm from polished surfaces in post-CMP cleaning. During the cleaning process, the residual nano-particles exert shear force in the inevitable shear flow. In order to understand the cleaning mechanism, it is indispensable to investigate not only the force but also the energy acting on different-sized nano-particles. In this article, we proposed the evaluation of detachment energy (the energy required to detach nano-particles) by using Lateral Force Microscopy. As an example, the dominant detachment energy of the silica nano-particle between the oxide film is the potential energy of the hydrogen bond. It suggested that the silica nano-particle detachment involves the breaking of hydrogen bonds.
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Force Microscopy Techniques and Applications · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Mechanical and Information Science and Technology, Kyushu Institute of Technology, Iizuka 820-8502, Fukuoka, Japan
Department of Chemical and Biomolecular Engineering, Clarkson University, Potsdam, NY 13699, USA
Ebara Corporation, Ltd., Fujisawa 251-0875, Kanagawa, Japan
Funding
Japan Society for Promotional Science
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