Nanomanufacturing processes: a critical review
Source abstract
Abstract
Nanomanufacturing encompasses processes aimed at building nanoscale structures, devices and systems in one, two or three dimensions. Nanomanufacturing involves both bottom-up and top-down approaches. This paper reviews and discusses some critical issues of nanomanufacturing from the cost, production rate, quality and flexibility point of view.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Advanced Machining and Optimization Techniques · Nanofabrication and Lithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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