Analysis of Mode-Coupling Vibrations in Thickness-Shear and c-Axis-Tilted FBAR Sensors
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OpenAlex topics: Acoustic Wave Resonator Technologies · Ultrasonics and Acoustic Wave Propagation · Structural Health Monitoring Techniques
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References (41)
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1. Zou Y, Gao C, Zhou J, Liu Y, Xu QW, Qu YH, et al. Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications. Microsyst Nanoeng. 2022;8(1):124.10.1038/s41378-022-00457-0 ↗
2. Lakin KM. A review of thin-film resonator technology. IEEE Microw Mag. 2003;4(4):61–7.10.1109/MMW.2003.1266067 ↗
3. Gao JN, Liu GR, Li J, Li GQ. Recent developments of film bulk acoustic resonators. Funct Mater Lett. 2016;9(3):1630002.10.1142/S1793604716300024 ↗
4. Lin WK, Yun XF, Wang XY, Zeng ZM, Wang YQ, Zhang XD, et al. Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer. Mater Res Express. 2021;8(9):095701.10.1088/2053-1591/ac2099 ↗
5. Liu J, Du JK, Wang J, Yang JS. Long thickness-extensional waves in thin film bulk acoustic wave filters affected by interdigital electrodes. Ultrasonics. 2017;75:226–32.10.1016/j.ultras.2016.12.004 ↗
6. Meltaus J, Pensala T, Kokkonen K. Parametric study of laterally acoustically coupled bulk acoustic wave filters. IEEE Trans Ultrason Ferroelectr Freq Control. 2012;59(12):2742–51.10.1109/TUFFC.2012.2515 ↗
7. Nakamura K, Sato S, Ohta S, Yamada K, Doi A. Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2005;52(4):604–9.10.1109/TUFFC.2005.1428043 ↗
8. Ji XJ, Fan YP, Han T, Cai P. Nonlinear thickness-stretch vibration of thin-film acoustic wave resonators. Acoust Phys. 2016;62:160–4.10.1134/S1063771016020159 ↗
9. Sekimoto J, Suzuki M, Kakio S. High-order mode bulk acoustic wave resonators based on polarity-inverted SiAlN/AlN multilayered films for high-frequency operation. Appl Phys Lett. 2022;121(14):9041–6.10.1063/5.0106428 ↗
10. Zhu F, Zhang Y, Wang B, et al. An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators. Acta Mech Solida Sin. 2017;30(3):263–70.10.1016/j.camss.2017.04.001 ↗
11. Zhao ZN, Wang B, Qian ZH, Kuznetsova I, Ma TF, Yong YK. Design considerations for frequency shifts in a laterally finite FBAR sensor in contact with the Newtonian liquid. IEEE Trans Ultrason Ferroelectr Freq Control. 2020;67(11):2402–12.10.1109/TUFFC.2020.3006186 ↗
12. Zhou Y, Zou Y, Gao C, Xu Q, Tong X, Lin B, et al. Investigation of film bulk acoustic resonators for sensing applications in liquid environment. Appl Phys Lett. 2022;121(21):3501–8.10.1063/5.0124829 ↗
13. Fu YQ, Luo JK, Du XY. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sens Actuators B Chem. 2010;143(2):606–9.10.1016/j.snb.2009.10.010 ↗
14. Hallil H, Dejous C, Hage-Ali S. Passive resonant sensors: trends and future prospects. IEEE Sens J. 2021;21(11):12618–32.10.1109/JSEN.2021.3065734 ↗
15. Du JK, Xian K, Wang J, Yang JS. Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes. Ultrasonics. 2009;49:149–52.10.1016/j.ultras.2008.09.003 ↗
16. Liu J, Ma TF, Du JK, Wang J, Yang JS. An analysis of an unbounded thin film bulk acoustic wave piezoelectric resonator with a circular driving electrode. Int J Appl Electromagn Mech. 2018;56(1):11–9.10.3233/JAE-170014 ↗
17. Zhao ZN, Qian ZH, Wang B. Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters. AIP Adv. 2016;6(1):015002.10.1063/1.4939695 ↗
18. Zhao ZN, Li N, Qu YL, Chen WQ. Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode. Appl Math Mech. 2023;44(12):2187–206.10.1007/s10483-023-3056-6 ↗
19. Li N, Qian ZH, Yang JS. Two-dimensional equations for piezoelectric thin-film acoustic wave resonators. Int J Solids Struct. 2017;110:170–7.10.1016/j.ijsolstr.2017.01.031 ↗
20. Zhang ZX, Liang J, Zhang DH, Pang W, Zhang H. A novel bulk acoustic wave resonator for filters and sensors applications. Micromachines. 2015;6(9):1306–16.10.3390/mi6091306 ↗
21. Tiersten HF, Stevens DS. An analysis of thickness-extensional trapped energy resonant device structures with rectangular electrodes in the piezoelectric thin film on silicon configuration. J Appl Phys. 1983;54(10):5893–910.10.1063/1.331763 ↗
22. Wang J, Yang JS. Higher-order theories of piezoelectric plates and applications. Appl Mech Rev. 2000;53(4):87–99.10.1115/1.3097341 ↗
23. Li N, Qian ZH, Yang JS. Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators. AIP Adv. 2017;7(5):055113.10.1063/1.4983890 ↗
24. Li N, Wang B, Qian ZH. Effects of mode couplings on the vibration characteristics of partially electroded thin-film bulk acoustic wave resonators. AIP Adv. 2019;9(6):065203.10.1063/1.5092541 ↗
25. Li N, Wang B, Qian ZH. Suppression of spurious lateral modes and undesired coupling modes in frame-like FBARs by 2-D theory. IEEE Trans Ultrason Ferroelectr Freq Control. 2019;67(1):180–90.10.1109/TUFFC.2019.2942343 ↗
26. Zhao ZN, Wang B, Qian ZH, Yong YK. A novel approach to quantitative predictions of high-frequency coupled vibrations in layered piezoelectric plates. Int J Eng Sci. 2020;157:103407.
27. Zhao ZN, Pang XN, Qian ZH, Kuznetsova I, Ma TF, Yong YK. Lateral size-dependence in UHF mode-coupled ZnO FBARs to suppress undesirable eigen-modes and weaken mounting effect. IEEE Trans Ultrason Ferroelectr Freq Control. 2020;67(8):1647–55.10.1109/TUFFC.2020.2981645 ↗
28. Zhao ZN, Chen WQ. Predictions of dynamic multimode-coupling and high-frequency vibrations in magneto-electro-elastic heterostructures. IEEE Trans Ultrason Ferroelectr Freq Control. 2022;69(5):1804–14.10.1109/TUFFC.2022.3160162 ↗
29. Zhao ZN, Chen WQ. Investigation on high-frequency and mode-coupling vibrations in thickness-extensional piezoelectric thin-film resonators with initial stress. Appl Math Mech. 2022;112:78–90.
30. Zhang HF, Kosinski JA. Correspondence-Analysis of thickness vibrations of c-axis inclined zig-zag two-layered zinc oxide thin-film resonators. IEEE Trans Ultrason Ferroelectr Freq Control. 2012;59(12):2831–6.10.1109/TUFFC.2012.2526 ↗
31. Zhang HF, Bao YY. Sensitivity analysis of multi-layered c-axis inclined zigzag zinc oxide thin-film resonators as viscosity sensors. IEEE Trans Ultrason Ferroelectr Freq Control. 2014;61(3):525–34.10.1109/TUFFC.2014.2936 ↗
32. Mindlin RD. Vibrations of quartz plates with the HP-67 pocket calculator. Comput Struct. 1979;10(5):751–9.10.1016/0045-7949(79)90039-7 ↗
33. Tiersten HF. Linear piezoelectric plate vibrations: elements of the linear theory of piezoelectricity and the vibrations piezoelectric plates. Springer; 2013.
34. Zhao ZN, Wang B, Zhu JQ, Huang B. Frequency spectra of coupling vibration in high-frequency thickness-shear ZnO thin film resonator applied in sensing field based on the Hamilton principle. IEEE Trans Ultrason Ferroelectr Freq Control. 2019;66(8):1331–9.10.1109/TUFFC.2019.2914587 ↗
35. Mindlin RD. High frequency vibrations of quartz plates by expansion in series of Ekstein functions. Int J Solids Struct. 1980;16(9):785–91.10.1016/0020-7683(80)90049-9 ↗
36. Li N, Wang B, Qian ZH, Kuznetsova I, Ma TF. Two-dimensional plate theory for the analysis of coupling vibrations in shear mode FBARs. IEEE Trans Ultrason Ferroelectr Freq Control. 2020;67(9):1897–908.10.1109/TUFFC.2020.2992287 ↗
37. Qin LF, Chen QM, Cheng HB, Wang QM. Analytical study of dual-mode thin film bulk acoustic resonators (FBARs) based on ZnO and AlN films with tilted c-axis orientation. IEEE Trans Ultrason Ferroelectr Freq Control. 2010;57(8):1840–53.10.1109/TUFFC.2010.1623 ↗
38. Zhao ZN, Li N, Qu YL, Chen WQ. Coupled vibrations of thickness-extensional FBARs under stress-strain biasing state. Int J Mech Sci. 2024;284:109748.10.1016/j.ijmecsci.2024.109748 ↗
39. Auld BA. Acoustic fields and waves in solids. Hoboken, NJ, USA: Wiley; 1973.
40. Kang DJ, Kim JS, Jeong SW, Roh Y, Jeong SH, Boo JH. Structural and electrical characteristics of R.F. magnetron sputtered ZnO films. Thin Solid Films. 2005;475(1–2):160–5.10.1016/j.tsf.2004.07.029 ↗
41. Zhu F, Wang B, Qian ZH. A numerical algorithm to solve multivariate transcendental equation sets in complex domain and its application in wave dispersion curve characterization. Acta Mech. 2019;230(4):1303–21.10.1007/s00707-017-2025-y ↗