Application of a Genetic Algorithm on the Assessment of the Capabilities of Cctuator Systems for Laser Mircro Adjustment

Laser forming with actuator systems is a very attractive process to meet the rising demand for accuracy in micro system technology. However, the actuator systems have to be designed specifically for the given adjustment task. A computer assisted design system for actuator systems for laser based micro adjustment has been developed which supports the designer by creating a number of optimized design choices from a starting design. A multiobjective genetic algorithm has been successfully applied to this task. The algorithm for evaluation of adjustment capability of the actuator system uses another single objective genetic algorithm to determine the forming capability of the actuator system. The approach is similar to the inverse kinematics algorithm used in robotics but also considers elastic forming. The irradiated components of the actuator system are treated as robotic links for which the amount of laser based forming are the link parameter. An elastic structural mechanic simulation of the actuator system with beam elements calculates the resulting adjustment movement of the actuator system. The research performed to develop a configuration of this algorithm specifically to the needs of actuator system design evaluation is presented in this paper.