Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
Source abstract
Abstract
We describe a device for inter-chip or intra-chip optical communications that contains the Circular Defect in photonic crystal (CirD) lasers array driven by vertical current injection. In order to improve the conductivity of the structure while also preventing current leakage, we introduce the oblique deposition of electrodes on a photonic crystal pattern by using an electron beam evaporation apparatus. The performance of an electrode is investigated by a transmission line method, and the CirD structure is fabricated with the electrode. We analyze the voltage-current relationship and confirm the CirD structure’s low resistance of under 1 kΩ.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Photonic Crystals and Applications · Photonic and Optical Devices · Plant and animal studies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
Funding
Japan Society for the Promotion of Science
References (26)
Show source-provided references
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