Excimer Laser Three-Dimensional Micromachining Based on Image Projection and the Optical Diffraction Effect
Source abstract
Abstract
An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.
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Research context
OpenAlex topics: Advanced optical system design · Laser Material Processing Techniques · Nanofabrication and Lithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Mechanical Engineering, Cheng Kung University, Tainan 701, Taiwan
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