Opto-Acoustic Method for the Characterization of Thin-Film Adhesion
Source abstract
Abstract
The elastic property of the film-substrate interface of thin-film systems is characterized with an opto-acoustic method. The thin-film specimens are oscillated with an acoustic transducer at audible frequencies, and the resultant harmonic response of the film surface is analyzed with optical interferometry. Polystyrene, Ti, Ti-Au and Ti-Pt films coated on the same silicon substrate are tested. For each film material, a pair of specimens is prepared; one is coated on a silicon substrate after the surface is treated with plasma bombardment, and the other is coated on an identical silicon substrate without a treatment. Experiments indicate that both the surface-treated and untreated specimens of all film materials have resonance in the audible frequency range tested. The elastic constant of the interface corresponding to the observed resonance is found to be orders of magnitude lower than that of the film or substrate material. Observations of these resonance-like behaviors and the associated stiffness of the interface are discussed.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Ultrasonics and Acoustic Wave Propagation · Advanced Fiber Optic Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Chemistry and Physics, Southeastern Louisiana University, SLU 10878, Hammond, LA 70402, USA
Department of Mechanical Engineering, Niigata University, Ikarashi Ninocho 8050, Nishi-ku, Niigata-shi, Niigata 950-2181, Japan
Department of Mechanical Engineering, The Graduate School, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul 01811, Korea
Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul 01811, Korea
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