Study of Thermal Effect in the Interaction of Nanosecond Capillary Discharge Extreme Ultraviolet Laser with Copper
Source abstract
Abstract
Interaction of Extreme Ultraviolet (EUV) laser with matters is an attractive subject since novel phenomena always occur under the effect of high energy photons. In this paper, the thermal effect involved in the interaction of a capillary discharge 46.9 nm laser with copper was studied theoretically and experimentally. The temperature variation of the laser-irradiated region of copper was calculated. According to the results, the copper surface was ablated obviously and presented the trace of melting, evaporation, and resolidification, which suggested the thermal effect occurred on the surface during the laser irradiation.
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Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Laser Design and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China
Research Center for Space Optics Engineering, Harbin Institute of Technology, Harbin 150001, China
Funding
National Natural Science Foundation of China
References (20)
Show source-provided references
1. Luminescent silicon nanoparticles prepared by ultra short pulsed laser ablation in liquid for imaging app lications10.1364/OME.2.000510 ↗
2. Hou, S., Birowosuto, M.D., Umar, S., Anicet, M.A., Tay, R.Y., Coquet, P., Tay, B.K., Wang, H., and Teo, E.H.T. (2017). Localized Emission from Laser-Irradiated Defects in Two-Dimensional Hexagonal Boron Nitride. 2D Mater., 5.10.1088/2053-1583/aa8e61 ↗
3. Light emission from localised point defects induced in GaN crystal by a femtosecond-pulsed laser10.1364/OME.8.002703 ↗
4. Oxidation-stable plasmonic copper nanoparticles in photocatalytic TiO2 nanoarchitectures10.1039/C7NR04805J ↗
5. Goniometer-based femtosecond crystallography with X-ray free electron lasers10.1073/pnas.1418733111 ↗
6. Explosion dynamics of sucrose nanospheres monitored by time of flight spectrometry and coherent diffractive imaging at the split-and-delay beam line of the FLASH soft x-ray laser10.1364/OE.22.028914 ↗
7. Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision10.1038/s42005-019-0253-2 ↗
8. Demonstration of a discharge pumped table-top soft-x-ray laser10.1103/PhysRevLett.75.1236 ↗
9. Damage to extreme ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9nm-laser pulses10.1364/OL.29.000620 ↗
10. Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser10.1103/PhysRevApplied.3.064013 ↗
11. Short-wavelength ablation of polymers in the high-fluence regime10.1088/0031-8949/2014/T161/014066 ↗
12. Formation of nanostructures induced by capillary-discharge soft X-ray laser on BaF2 surfaces10.1016/j.apsusc.2016.11.111 ↗
13. Si and Cu ablation with a 46.9-nm laser focused by a toroidal mirror10.1364/OE.23.014126 ↗
14. Zhao, Y., Mo, M., Xie, Y., Yang, S., and Wang, Q. (August, January 30). Observation of a saturated soft X-raylaser in a low current capillary discharge. Proceedings of the Conference on Lasers and Electro-Optics/Pacific Rim, Optical Society of America 2009, Shanghai, China.10.1109/CLEOPR.2009.5292359 ↗
15. Demonstration ofsoft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge10.1364/OL.36.003458 ↗
16. Theoretical Form Factor, Attenuation, and Scattering Tabulation for Z = 1−92 from E = 1−10 eV to E = 0.4−1.0 MeV10.1063/1.555974 ↗
17. Pulsed laser ablation of copper10.1016/0169-4332(94)00370-X ↗
18. Kolacek, K., Schmidt, J., Straus, J., Mackay, K., and Givord, D. (2014, January 25). Interaction of extreme ultraviolet laser radiation with solid surface: Ablation, desorption, nanostructuring. Proceedings of the XX International Symposium on High Power Laser Systems and Applications, Chengdu, China.10.1117/12.2071273 ↗
19. Miller, J.C., and Haglund, R.F. (1997). Laser Ablation and Desorption, Academic Press. Experimental Methods in the Physical Sciences.10.1016/S0076-695X(08)60393-2 ↗
20. Tallents, G.J., Wilson, S.A., Lolley, J., Aslanyan, V., West, A., Rossall, A.K., Solis-Meza, E., Wagenaars, E., Menoni, C.S., and Rocca, J.J. (2019, January 9). Extreme ultraviolet laser ablation of solid targets. Proceedings of the SPIE Optical Engineering + Applications, San Diego, CA, USA.10.1117/12.2528736 ↗