Elastic Wave Measurement Using a MEMS AE Sensor
Source abstract
Abstract
In recent years, with the continuing progress of aging social infrastructures such as bridges and tunnels, there has been high demand for the assessment of deterioration of their performance and conditions. Since current inspection methods for those structures have mainly relied on human resources, it is important to reduce their increasing maintenance cost. One of the key methods for achieving effective maintenance without expensive human costs is to use sensors to discriminate between healthy and unhealthy conditions. In this paper, a MEMS (micro electro mechanical systems) wideband frequency sensor, which is referred to as a super acoustic (SA) sensor, is evaluated through the pencil lead break (PLB) test. Due to its wideband frequency characteristics, the SA sensor is expected to be a promising alternative to the existing vibration sensors, including acoustic emission (AE) sensors. Several PLB signals were generated on an aluminum plate (5 mm thick), and propagating Lamb waves were detected by both AE and SA sensors. SA sensors were able to identify the location of PLB sources on the plate by measuring time differences between each sensor. By comparing the wave spectrums of both the AE and SA sensors analyzed by wavelet transform, the applicability of SA sensor for AE measurement is verified.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Ultrasonics and Acoustic Wave Propagation · Structural Health Monitoring Techniques · Acoustic Wave Resonator Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Toshiba Corporation, 1, Komukai-toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa 212-8582, Japan
NMEMS Technology Research Organization, MBR99 building 6F, 67, Sakuma-kashi, Kanda, Chiyoda-ku, Tokyo 101-0026, Japan
IRT Research Institute, The University of Tokyo, 7-3-1 Hongo, Bunnkyo-ku, Tokyo 113-8656, Japan
Department of Mechanical Engineering, Faculty of Science and Engineering, Toyo University, 2100 Kujirai, Kawagoe-shi, Saitama 350-8585, Japan
Department of Mechano-Informatics, The University of Tokyo, 7-3-1 Hongo, Bunnkyo-ku, Tokyo 113-8656, Japan
References (19)
Show source-provided references
1. Shiotani, T., Osawa, S., Momoki, S., and Ohtsu, H. (2015). Visualization of Damage in RC Bridge Deck for Bullet Trains with AE Tomography, Advances in Acoustic Emission Technology. Springer Proceedings in Physics, Springer.10.1007/978-1-4939-1239-1_33 ↗
2. Nishida, T., Shiotani, T., Asaue, H., Maejima, T., and Kobayashi, Y. (2016, January 5–9). Damage Evaluation of RC Bridge Deck under Wheel Loading Test by Means of AE. Tomography. Proceedings of the 8th International Conference on Acoustic Emission, Kyoto, Japan.
3. Pham, Q.K., Nguyen, M.D., Nguyen, B.K., Phan, H.P., Matsumoto, K., and Isao, S. (2014, January 26–30). Multi-axis force sensor with dynamic range up to ultrasonic. Proceedings of the IEEE MEMS, San Francisco, CA, USA.
4. Kaneko, T., Nguyen, M.D., Pham, Q.K., Takei, Y., Takahata, T., Matsumoto, K., and Shimoyama, I. (2015, January 18–22). Pulse wave measurement in human using piezoresistive cantilever on liquid. Proceedings of the IEEE MEMS, Estoril, Portugal.10.1109/MEMSYS.2015.7051046 ↗
5. Pham, Q.K., Nguyen, M.D., Matsumoto, K., and Shimoyama, I. (2015, January 21–25). Acoustic Emission Sensor using Liquid-on-Beam Structure. Proceedings of the IEEE Transducers, Anchorage, Alaska.
6. Resonant capacitive MEMS acoustic emission transducers10.1088/0964-1726/15/6/041 ↗
7. In-Plane MEMS Acoustic Emission Sensors Development and Experimental Characterization
8. Development of a MEMS acoustic emission sensor system10.1117/12.715357 ↗
9. Electrical Characterization of Coupled and Uncoupled MEMS Ultrasonic Transducers10.1109/TUFFC.2003.1193623 ↗
10. MEMS Ultrasonic Transducers for the Testing of Solids10.1109/TUFFC.2003.1193624 ↗
11. Development of a Thick Film PZT Foil Sensor for Use in Structural health Monitoring Applications10.1109/TUFFC.2013.2573 ↗
12. Acoustic emission sensor with structure-enhanced sensing mechanism based on micro-embossed piezoelectric polymer10.1016/j.sna.2010.06.019 ↗
13. A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass10.3390/s110807892 ↗
14. Differential pressure sensor using a piezoresistive cantilever10.1088/0960-1317/22/5/055015 ↗
15. Omori, T., Usui, T., Watabe, K., Nguyen, M.D., Matsumoto, K., and Shimoyama, I. (2016, January 5–9). Elastic Wave Measurement using a MEMS AE Sensor. Proceedings of the 8th International Conference on Acoustic Emission, Kyoto, Japan.
16. Nguyen, M.D., Pham, Q.K., Matsumoto, K., and Shimoyama, I. (2016, January 22–25). MEMS Based Acoustic Emission sensor. Proceedings of the AEWG-58, Philadelphia, PA, USA.
17. (2010). Standard Guide for Determining the Reproducibility of Acoustic Emission Sensor Response, American Society for Testing and Materials. ASTM E976-10.
18. Acoustic Emission Signals Generated by monopole (Pencil-Lead Break) versus Dipole Sources: Finite Element modeling and Experiments
19. Matsuda, N., Nguyen, M.D., Takahata, T., and Shimoyama, I. (2017, January 22–26). A multi-axis piezoresistive MEMS sensor for acoustic emission. Proceedings of the IEEE MEMS, Las Vegas, NV, USA.10.1109/MEMSYS.2017.7863626 ↗