Femtosecond laser-engraved ultra-broad-range pressure sensors with enhanced sensitivity

Abstract Achieving flexible pressure sensors that simultaneously combine ultra-high sensitivity, ultra-broad detection range, and low detection limit remains a major challenge because of the intrinsic trade-off between signal sensitivity and working span. Here, we demonstrate a femtosecond laser engraving approach that directly constructs programmable hybrid micro/nanostructures on metallic electrodes in a single, mask-free step. This top-down laser patterning process produces dual-scale micro/nanostructures, significantly expanding the interfacial coupling region and enhancing sensor performance. The resulting iontronic pressure sensors exhibit extreme capabilities, characterized by a maximum sensitivity reaching 6 414 kPa ⁻¹ , a wide sensing range up to 800 kPa, a low detection threshold of 3.4 Pa, a rapid signal response (∼30 ms), and excellent cycling stability. For demonstration, the sensors were integrated into a wearable multi-octave glove system, and their robustness in multifunctional pressure recognition was validated. This work highlights the use of the femtosecond laser-based approach as an efficient and scalable manufacturing method for tunable, hybrid micro/nanostructures, opening new opportunities for advanced electronic skins, intelligent robotics, and human–machine interfaces.