journal article·2023-03-01Open access

High efficiency GHz laser processing with long bursts

Eric Audouard, Eric Mottay

Abstract

Abstract Bursts of GHz repetition rate pulses involve more ablation mechanisms than single femtosecond pulses. Efficient ablation by GHz laser pulses is a multi-step process, consisting of a first thermal incubation phase, followed by a highly efficient ablation phase. GHz ablation therefore combines thermal and non-thermal ablation mechanisms. With an optimal choice of the burst duration, the ablation efficiency can be highly enhanced. Long bursts, comprising tens of pulses to hundreds of pulses, are needed to take full advantage of the increase in ablation efficiency.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Advanced Fiber Laser Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (49)

Show source-provided references
1. Efficient metal processing using high average power ultrafast laser10.2961/jlmn.2017.03.0020 ↗
2. Ultrafast lasers today10.1002/phvs.202200010 ↗
3. Multi-100-Watt femtosecond laser perspectives10.1002/latj.201800008 ↗
4. Ablation-cooled material removal with ultrafast bursts of pulses10.1038/nature18619 ↗
5. High-power Yb-based all-fiber laser delivering 300 fs pulses for high-speed ablation-cooled material removal10.1364/OL.43.000535 ↗
6. Bonamis · 2018 · p AM2M
7. High efficiency femtosecond laser ablation with gigahertz level bursts10.2351/1.5096087 ↗
8. High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source10.1364/OL.44.002193 ↗
9. Méthode de Détermination Des Conditions Opérationnelles d’un Procédé d’ablation Laser Femtoseconde à Très Haute Cadence Pour Un Matériau Donné
10. Systematic study of laser ablation with GHz bursts of femtosecond pulses10.1364/OE.400624 ↗
11. Conception et réalisation d’une source laser femtoseconde GHz et applications au régime d’ablation très haute cadence
12. GHz femtosecond processing with agile high-power laser: high power and flexible fs lasers in GHz burst mode open new horizons for femtosecond laser processing10.1515/aot-2021-0029 ↗
13. New possibilities with femtosecond GHz-burst laser processing
14. Percussion drilling in glasses and process dynamics with femtosecond laser GHz-bursts10.1364/OE.455553 ↗
15. Ultrafast laser ablation of Copper with GHz-bursts
16. Simulation of ultrafast bursts of subpicosecond pulses: in pursuit of efficiency10.1063/1.5012758 ↗
17. Surface treatment with GHz bursts
18. High-quality surface treatment using GHz burst mode with tunable ultrashort pulses10.1016/j.apsusc.2020.147270 ↗
19. Enhanced ablation using GHz-pulsed fs laser
20. Micromachining flexibility by tunable ultrashort pulse duration, pulse-on-demand, and hybrid processing from single pulse to GHZ burst with TruMicro series 2000
21. Enhanced ablation efficiency using GHz bursts in micromachining fused silica10.1364/OL.415959 ↗
22. Will GHz burst mode create a new path to femtosecond laser processing?10.1088/2631-7990/ac2479 ↗
23. Ultrafast laser ablation of silicon with ∼GHz bursts10.2351/7.0000372 ↗
24. Ultrafast laser ablation of copper by GHz bursts10.1007/s00339-020-03853-3 ↗
25. Milling applications with GHz burst: investigations concerning the removal rate and machining quality10.1016/j.procir.2020.09.111 ↗
26. Micromachining of invar foils with GHz, MHz and kHz femtosecond burst modes10.3390/mi11080733 ↗
27. Machining metals and silicon with GHz bursts: surprising tremendous reduction of the specific removal rate for surface texturing applications
28. Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates10.1364/OE.417883 ↗
29. Review on experimental and theoretical investigations of ultra-short pulsed laser ablation of metals with burst pulses10.3390/ma14123331 ↗
30. Laser micromachining of steel and copper using femtosecond laser pulses in GHz burst mode10.1016/j.rinp.2021.103847 ↗
31. Material processing at GHz burst mode by femtosecond laser ablation10.2961/jlmn.2021.01.2004 ↗
32. Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts (BiBurst)10.1088/2631-7990/ac466e ↗
33. Femtosecond and picosecond laser drilling of metals at high repetition rates and average powers10.1364/OL.34.003304 ↗
34. Hydrodynamic simulations of metal ablation by femtosecond laser irradiation10.1103/PhysRevB.71.165406 ↗
35. Optimization of femtosecond laser processing of silicon via numerical modeling10.1364/OME.6.002745 ↗
36. High shock release in ultrafast laser irradiated metals: scenario for material ejection10.1103/PhysRevB.75.104105 ↗
37. Simulation of single-, double- and multi-pulse laser ablation of metals10.1088/1742-6596/1147/1/012063 ↗
38. Surface patterning of monocrystalline silicon induced by spot laser melting10.1063/1.5049781 ↗
39. Integrating two-temperature and classical heat accumulation models to predict femtosecond laser processing of silicon10.1364/OME.8.000648 ↗
40. Phase explosion of a metastable fluid10.1007/BF00754998 ↗
41. Critical-point phase separation in laser ablation of conductors10.1103/PhysRevLett.86.2573 ↗
42. Delayed phase explosion during high-power nanosecond laser ablation of silicon10.1063/1.1473862 ↗
43. Temperature dependent ablation threshold in silicon using ultrashort laser pulses10.1063/1.4766380 ↗
44. Attosecond band-gap dynamics in silicon10.1126/science.1260311 ↗
45. Optical measurement techniques of recombination lifetime based on the free carriers absorption effect10.1155/2014/291469 ↗
46. Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy10.1016/S0169-4332(03)00881-X ↗
47. Thermal conductivity of silicon and germanium from 3°K to the melting point10.1103/PhysRev.134.A1058 ↗
48. Influence of the burst mode onto the specific removal rate for metals and semiconductors10.2351/1.5096083 ↗
49. Surface ablation efficiency and quality of fs lasers in single-pulse mode, fs lasers in burst mode, and ns lasers10.1016/j.apsusc.2019.144594 ↗