Atomic layer deposition to heterostructures for application in gas sensors
Source abstract
Abstract
Highlights Atomic layer deposition is versatile in precise design of heterostructure materials. Gas sensing performances of heterostructures engineered by ALD are reviewed. Future developments and challenges faced by ALD-designed materials are discussed.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Electronic and Structural Properties of Oxides · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
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