Spatial Resolutions of On-Axis and Off-Axis Transmission Kikuchi Diffraction Methods
Source abstract
Abstract
Spatial resolution is one of the key factors in orientation microscopy, as it determines the accuracy of grain size investigation and phase identification. We determined the spatial resolutions of on-axis and off-axis transmission Kikuchi diffraction (TKD) methods by calculating correlation coefficients using only the effective parts of on-axis and off-axis transmission Kikuchi patterns. During the calculation, we used average filtering to evaluate the spatial resolution more accurately. The spatial resolutions of both on-axis and off-axis TKD methods were determined in the same scanning electron microscope at different accelerating voltages and specimen thicknesses. The spatial resolution of the on-axis TKD was higher than that of the off-axis TKD at the same parameters. Furthermore, with an increase in accelerating voltage or a decrease in specimen thickness, the spatial resolutions of the two configurations could be significantly improved, from tens of nanometers to below 10 nm. At a voltage of 30 kV and sample thickness of 74 nm, both on-axis and off-axis TKD methods exhibited the highest resolutions of 6.2 and 9.7 nm, respectively.
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Research context
OpenAlex topics: Surface and Thin Film Phenomena · Advanced Electron Microscopy Techniques and Applications · Microstructure and mechanical properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
The State Key Lab of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050, China
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Modern Mechanics, University of Science and Technology of China, Hefei 230027, China
Bruker (Beijing) Scientific Technology Co., Ltd., Shanghai 200233, China
Funding
National Key R&D Program of China · CAS key foundation for exploring scientific instrument · International partnership program of science · Shanghai Technical Platform for testing on inorganic materials · Shanghai Action Projects for Scientific and Technological Innovation
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