High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact
Source abstract
Abstract
This paper presents a measurement method for high-precision cutting edge radius of single point diamond tools using an atomic force microscope (AFM) and a reverse cutting edge artifact based on the edge reversal method. Reverse cutting edge artifact is fabricated by indenting a diamond tool into a soft metal workpiece with the bisector of the included angle between the tool’s rake face and clearance face perpendicular to the workpiece surface on a newly designed nanoindentation system. An AFM is applied to measure the topographies of the actual and the reverse diamond tool cutting edges. With the proposed edge reversal method, a cutting edge radius can be accurately evaluated based on two AFM topographies, from which the convolution effect of the AFM tip can be reduced. The accuracy of the measurement of cutting edge radius is significantly influenced by the geometric accuracy of reverse cutting edge artifact in the proposed measurement method. In the nanoindentation system, the system operation is optimized for achieving high-precision control of the indentation depth of reverse cutting edFigurege artifact. The influence of elastic recovery and the AFM cantilever tip radius on the accuracy of cutting edge radius measurement are investigated. Diamond tools with different nose radii are also measured. The reliability and capability of the proposed measurement method for cutting edge radius and the designed nanoindentation system are demonstrated through a series of experiments.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Advanced Measurement and Metrology Techniques · Advanced machining processes and optimization
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China
References (27)
Show source-provided references
1. Large-scale Fabrication of micro-lens array by novel end-fly-cutting servo diamond machining10.1364/OE.23.020593 ↗
2. Spiral tool path generation for diamond turning optical freeform surfaces of quasi-revolution10.1016/j.cad.2014.08.001 ↗
3. Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder10.1016/S0141-6359(03)00028-X ↗
4. Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine10.1016/j.precisioneng.2007.01.003 ↗
5. A critical review on the chemical wear and wear suppression of diamond tools in diamond cutting of ferrous metals10.1088/2631-7990/ab5d8f ↗
6. Submicron functional surface generated by diamond machining10.1016/j.cirp.2010.03.037 ↗
7. Study on diamond cutting of ion implanted tungsten carbide with and without ultrasonic vibration10.1007/s41871-019-00042-6 ↗
8. Diamond tool wear in the ultra-Precision cutting of large electroless nickel and fabrication of replicated mirrors for a soft X-ray microscope10.1299/jsmec.49.56 ↗
9. Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor10.1016/j.precisioneng.2005.11.008 ↗
10. Gao, W. (2010). Precision Nanometrology–Sensors and Measuring Systems for Nanomanufacturing, Springer.10.1007/978-1-84996-254-4 ↗
11. Measurement technologies for precision positioning10.1016/j.cirp.2015.05.009 ↗
12. Precision measurement of cutting tools with two matched optical 3D-sensors10.1016/S0007-8506(07)60621-0 ↗
13. Edge detection and measurement of nose radii of cutting tool inserts from scanned 2-D images10.1016/j.optlaseng.2012.05.007 ↗
14. Surface imaging technique by an optically trapped microsphere in air condition10.1007/s41871-018-0004-0 ↗
15. Measuring the very small cutting-edge radius for a diamond tool using a new kind of SEM having two detectors10.1016/S0007-8506(07)61008-7 ↗
16. Customized cutting edge preparation by means of grinding10.1016/j.precisioneng.2013.01.004 ↗
17. Sawano, H., Ayada, S., Yoshioka, H., and Shinno, H. (2011, January 23–26). A newly developed AFM-Based three dimensional profile measuring system. Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, Como, Italy.
18. Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools10.1016/j.cirp.2009.03.009 ↗
19. Measuring the nose roundness of diamond cutting tools based on atomic force microscopy10.1116/1.3110011 ↗
20. Nano-precision measurement of diamond tool edge radius for wafer fabrication10.1016/S0924-0136(03)00757-X ↗
21. On-machine and in-process surface metrology for precision manufacturing10.1016/j.cirp.2019.05.005 ↗
22. An edge reversal method for precision measurement of cutting edge radius of single point diamond tools10.1016/j.precisioneng.2017.06.012 ↗
23. Molecular dynamics simulation of sub-nanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting10.1016/j.apsusc.2016.02.046 ↗
24. Molecular dynamics simulation of elastic-plastic deformation associated with tool-workpiece contact in force sensor-integrated fast tool servo10.1177/0954405416673116 ↗
25. An ultra-precision tool nano-indentation instrument for replication of single point diamond tool cutting edges10.1088/1361-6501/aaa913 ↗
26. One hundred years of hertz contact10.1243/PIME_PROC_1982_196_039_02 ↗
27. (2008). JCGM 100: 2008 GUM 1995 with Minor Corrections. Evaluation of Measurement Data—Guide to the Expression of Uncertainty in Measurement (GUM), BIPM.