Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror
Source abstract
Abstract
Off-axis parabolic mirrors have extensive applications in X-ray optics, with the precision of their curvature directly impacting grazing-incidence focusing performance. Notably, the off-axis parabolic surface has non-rotating and non-symmetrical characteristics. Ultra-precision raster grinding utilizing a diamond wheel is a common method. Crucially, establishing an optimal wheel path stands as the key to ensuring surface accuracy during off-axis paraboloid grinding. In this study, according to the double curvature property of an off-axis parabolic surface, two different wheel paths were compared: one tracing the meridian direction (parabolic generatrix) and the other following the arc vector direction (arc). The results showed that the wheel path in raster grinding stepping along the arc vector direction can obtain a smaller scallop height and higher surface accuracy. The surface accuracy of one step along the arc vector direction is 9.6 μm, and that of the other step along the meridian direction is 32.6 μm. A model of the scallop height was established based on the relative relationship between adjacent wheel paths, and the error is within 5%. According to the correlation between scallop height and shape error, we conducted an analysis of the spatial distribution of shape errors under varying wheel paths. The wheel path that steps along the arc vector is more suitable for raster grinding of the off-axis paraboloid. The above study can provide theoretical guidance for the wheel path planning of off-axis parabolic mirrors with high surface accuracy.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Advanced Measurement and Metrology Techniques · Advanced X-ray Imaging Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
Funding
National Natural Science Foundation of China · Major Science and Technology Project of Henan Province of China
References (37)
Show source-provided references
1. High-resolution, Lightweight, and Low-cost X-ray Optics for the Lynx Observatory10.1117/1.JATIS.5.2.021012 ↗
2. Construction of Freeform Mirrors for an Off-axis Telecentric Scanning System through Multiple Surfaces Expansion and Mixing10.1016/j.rinp.2020.103354 ↗
3. Biskch, M.P., Allgood, K.D., Chan, K.W., Hlinka, M., Kearny, J.D., Numata, A., Mazzare, J.R., Riveros, R., Saha, T.T., and Solly, P.M. (2019, January 13–15). Mass Manufacturing of High Resolution and Light-weight Monocrystalline Silicon X-ray Mirror Modules. Proceedings of the Conference on Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX as Part of the SPIE Optics + Photonics International Symposium on Optical Engineering + Applications, San Diego, CA, USA.10.1117/12.2530340 ↗
4. Coherence of X-ray in the Third Synchrotron Radiation Source10.7498/aps.63.104202 ↗
5. Small-angle X-ray Scattering in the Era of Fourth-generation Light Sources10.1107/S1600576723004971 ↗
6. Wheel Normal Grinding of Hard and Brittle Materials10.1007/s00170-015-6850-7 ↗
7. Li, Z.J., Peng, X.Q., and Song, C. (2017, January 4–6). Modeling and Simulation for Fewer-axis Grinding of Complex Surface. Proceedings of the Annual Conference of the Chinese-Society-for-Optical-Engineering (CSOE) on Applied Optics and Photonics China (AOPC)—Optoelectronics and Micro/Nano-Optics, Beijing, China.10.1117/12.2283257 ↗
8. Yan, Y.Y., Zhang, Z.Q., Liu, J.L., Yan, H.Z., and Wang, X.X. (2021). Study on the Algorithm of Three-Dimensional Surface Residual Material Height of Nano-ZrO2 Ceramics under Ultra-Precision Grinding. Micromachines, 12.10.3390/mi12111363 ↗
9. Surface Generation and Materials Removal Mechanism in Ultra-precision Grinding of Biconical Optics Based on Slow Tool Servo with Diamond Grinding Wheels10.1016/j.jmapro.2021.10.010 ↗
10. Ultra-precision Grinding of Monocrystalline Silicon Reflector10.3788/OPE.20192705.1087 ↗
11. Fabrication of Large-size SiC Mirror with Precision Aspheric Profile for Artificial Satellite
12. Review on the Progress of Ultra-precision Machining Technologies10.1007/s11465-017-0455-9 ↗
13. Fabrication of Optical Freeform Molds Using Slow Tool Servo with Wheel Normal Grinding10.1016/j.cirp.2019.04.083 ↗
14. Dressing Methods of Superabrasive Grinding Wheels: A review10.1016/j.jmapro.2019.06.020 ↗
15. Fabrication of Off-axis Aspheric Surfaces Using a Slow Tool Servo10.1016/j.ijmachtools.2011.01.008 ↗
16. Ultra-precision Ductile Grinding of Off-Axis Biconical Free-Form Optics with a Controllable Scallop Height Based on Slow Tool Servo with Diamond Grinding Wheels10.1007/s40684-022-00481-5 ↗
17. An Investigation into Parallel and Cross Grinding of Aspheric Surface on Monocrystal Silicon10.1007/s00170-015-7045-y ↗
18. Ultra-precision raster grinding of monocrystalline silicon biconical free-form optics using arc-shaped diamond grinding wheels10.1016/j.jmapro.2020.09.020 ↗
19. Dressing Technology of Arc Diamond Wheel by Roll Abrading in Aspheric Parallel Grinding10.1007/s00170-019-04446-y ↗
20. A Closed-form Solution to the Problem of Optimal Tool-path Generation for Sculptured Surface Machining on Multi-axis NC Machine10.1016/j.mcm.2004.08.014 ↗
21. Nonuniform Rational Basis Spline Interpolation for Off-Axis Aspheric Mirror Grinding Based on Wheel Path Planning10.1155/2021/6640299 ↗
22. Profile Error Compensation Approaches for Parallel Nanogrinding of Aspherical Mould Inserts10.1016/j.ijmachtools.2007.06.008 ↗
23. Optimization of Tool Path for Uniform Scallop-Height in Ultra-precision Grinding of Free-form Surfaces10.1007/s41871-019-00048-0 ↗
24. Modelling the Processing Parameters of Rotary Curved Surface Grinding Using RSM10.4028/www.scientific.net/AMR.338.130 ↗
25. Simulation and Experimental Research of Tool Path Planning on Profile and Surface Generation of Aspherical-cylindrical Lens Array by Ultra-precision Envelope Grinding10.1016/j.jmatprotec.2022.117690 ↗
26. Freeform Surface Characterisation—A Fresh Strategy10.1016/j.cirp.2007.05.132 ↗
27. Parallel Grinding Error for a Noncoaxial Nonaxisymmetric Aspheric Lens Using a Fixture with Adjustable Gradient10.1007/s00170-012-4347-1 ↗
28. Tool Path Generation of Ultra-precision Diamond Turning: A State-of-the-art Review10.1016/j.npe.2019.10.003 ↗
29. Study of Tool Paths Calculated by Different Commercial CAM Systems and Influences on the Real Machining Time and Surface Roughness for Milling Free-form Geometries
30. Grinding Marks on Ultra-Precision Grinding Spherical and Aspheric Surfaces10.1007/s40684-017-0047-5 ↗
31. Form Error Compensation in Single-point Inclined Axis Nanogrinding for Small Aspheric Insert10.1007/s00170-012-4182-4 ↗
32. Estimation of Scallop Height in Freeform Surface CNC Machining10.1007/s00170-019-04269-x ↗
33. Lv, Z.K., Su, Z.K., Zhang, D., Yang, Z.M., Yang, X.H., Wei, X., Li, J., Fang, F.Z., Zhang, H., and Li, X. (2019). Displacement Measurement Method Based on the Rotating Paraboloid Array. Appl. Sci., 9.10.3390/app9163315 ↗
34. Li, X.H., Li, J., Wei, X., Yang, X.H., Su, Z.K., Liang, J.Q., Yang, Z.M., and Fang, F.Z. (2020). A Noncontact Method for Calibrating the Angle and Position of the Composite Module Array. Appl. Sci., 10.10.3390/app10124358 ↗
35. Review on Mid-spatial Frequency Error Suppression in Optical Components Manufacturing10.1007/s00170-023-11408-y ↗
36. Theoretical and Experimental Investigation into the Formation Mechanism of Surface Waviness in Ultra-precision Grinding10.1016/j.triboint.2023.108269 ↗
37. A Review of Selected Topics in Interferometric Optical Metrology10.1088/1361-6633/ab092d ↗