Transparent and Scratch‐Resistant C:ZrO _x Coatings on Polymer and Glass by Plasma‐Enhanced Chemical Vapor Deposition

Transparent and scratch‐resistant zirconium oxide thin films were deposited in radio‐frequency plasma‐enhanced chemical vapor deposition process on glass and polycarbonate substrates using zirconium‐ tetra‐tert ‐butoxide, [Zr(O ^t Bu) ₄ ], as the precursor. Investigations on film morphology (AFM), thickness (cross‐sectional SEM), phase structure (X‐ray diffraction), chemical composition (X‐ray photoelectron spectroscopy), and optical properties (UV/Vis, ellipsometry) revealed the interplay of process parameters (plasma power, gas composition, deposition time, and precursor flux) on the composition and properties of the coatings. High‐quality transparent coatings (>90%) with a tunable refractive index ( n =1.7–2.1) and abrasion‐resistant properties were deposited on both polymer and glass substrates. Despite low deposition temperatures (<100°C), the coatings showed good adherence to the substrate and extraordinary barrier properties that were further improved by depositing intermediary SiO _x ‐layers. Phase analysis of the predominantly amorphous films showed the incipient crystallization of ZrO ₂ .