Novel Microsystem Applications with New Techniques in Low‐Temperature Co‐Fired Ceramics

Low‐temperature co‐fired ceramic (LTCC) enables development and testing of critical elements on microsystem boards as well as nonmicroelectronic meso‐scale applications. We describe silicon‐based microelectromechanical systems packaging and LTCC meso‐scale applications. Microfluidic interposers permit rapid testing of varied silicon designs. The application of LTCC to micro‐high‐performance liquid chromatography (μ‐HPLC) demonstrates performance advantages at very high pressures. At intermediate pressures, a ceramic thermal cell lyser has lysed bacteria spores without damaging the proteins. The stability and sensitivity of LTCC/chemiresistor smart channels are comparable to the performance of silicon‐based chemiresistors. A variant of the use of sacrificial volume materials has created channels, suspended thick films, cavities, and techniques for pressure and flow sensing. We report on inductors, diaphragms, cantilevers, antennae, switch structures, and thermal sensors suspended in air. The development of “functional‐as‐released” moving parts has resulted in wheels, impellers, tethered plates, and related new LTCC mechanical roles for actuation and sensing. High‐temperature metal‐to‐LTCC joining has been developed with metal thin films for the strong, hermetic interfaces necessary for pins, leads, and tubes.