An On-Chip Silicon Photonics Thermometer with Milli-Kelvin Resolution
Source abstract
Abstract
Photonic-based thermometers have been attracting intense research interest as a potential alternative to traditional electrical thermometers due to their physical and chemical stability and immunity to electromagnetic interference. However, due to the high requirements for the stability of the laser source, the existing studies on resolution are only theoretical predictions and do not include real-measured results. In this paper, we report on the fabrication and characterization of an on-chip silicon whispering-gallery-mode (WGM) ring resonator thermometer. The strip grating and the ring structure were fabricated on the silicon-on-insulator (SOI) substrate by two-step etching. The quality-factor (Q-factor), temperature sensitivity, and measurement range of the packaged device were 21,400, 42 pm/K, and 150 K, respectively. The real-measured temperature resolution of 2.9 mK was achieved by virtue of the power and polarization stabilization of the laser source.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Photonic and Optical Devices · Advanced Fiber Optic Sensors · Mechanical and Optical Resonators
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Center for Advanced Measurement Science, National Institute of Metrology, Beijing 100029, China
College of Optical and Electronic Technology, China Jiliang University, Hangzhou 310018, China
School of Optics and Photonics, Beijing Institution of Technology, Beijing 100081, China
Funding
National Natural Science Foundation of China
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