A Matrix Effect Calibration Method of Laser-Induced Breakdown Spectroscopy Based on Laser Ablation Morphology

To improve the accuracy of three-dimensional (3D) reconstruction under microscopic conditions for laser-induced breakdown spectroscopy (LIBS), this study developed a novel visual platform by integrating an industrial CCD camera with a microscope. A customized microscale calibration target was designed to calibrate intrinsic and extrinsic camera parameters accurately. Based on the pinhole imaging model, disparity maps were obtained via pixel matching to reconstruct high-precision 3D ablation morphology. A mathematical model was established to analyze how key imaging parameters—baseline distance, focal length, and depth of field—affect reconstruction accuracy in micro-imaging environments. Focusing on trace element detection in WC-Co alloy samples, the reconstructed ablation craters enabled the precise calculation of ablation volumes and revealed their correlations with laser parameters (energy, wavelength, pulse duration) and the physical-chemical properties of the samples. Multivariate regression analysis was employed to investigate how ablation morphology and plasma evolution jointly influence LIBS quantification. A nonlinear calibration model was proposed, significantly suppressing matrix effects, achieving R2 = 0.987, and reducing RMSE to 0.1. This approach enhances micro-scale LIBS accuracy and provides a methodological reference for high-precision spectral analysis in environmental and materials applications.