Capacitive Angle Sensor Research Using COMSOL Multiphysics

This paper presents a method of simulating a capacitive sensor using COMSOL Multiphysics. A petal-form sensitive electrode structure applied to a capacitive angle sensor was simulated using COMSOL software; the angle was calculated using sines and cosines with capacitance value to fill in the simulation of the capacitive angle sensor. First, according to the construction principle of the sensor structure, a GeoGebra graphing calculator with theoretical analysis and expression of function was used to obtain the two-dimensional structure of the target petal-form sensitive structure. Second, the holistic structural model was completed by importing it into COMSOL Multiphysics and setting the electrical and mechanical rotation parameters, which realized the simulation of the rotation process. Finally, because errors were found, the structure design was improved by introducing an angle between the partition domain, and the simulation errors were reduced. The resulting curves and calculated angles were consistent with the theory; the simulation results showed that the maximum angle difference value was 0.0175° and the minimum angle difference value was 0.0018° of a single cycle structure.