Development of Highly Sensitive Temperature Microsensors for Localized Measurements
Source abstract
Abstract
This paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as for optimizing their layout. These RTDs were fabricated using well-established microfabrication and photolithographic techniques. The fabricated sensors feature high sensitivity (0.3542 mV/°C), linearity and reproducibility in a temperature range of 35 to 45 °C. Additionally, each sensor has a small size with a strong potential for their integration in microfluidic devices, as organ-on-a-chip, allowing the possibility for in-situ monitoring the physiochemical properties of the cellular microenvironment.
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Research context
OpenAlex topics: Analytical Chemistry and Sensors · thermodynamics and calorimetric analyses · Gas Sensing Nanomaterials and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Industrial Electronics, Microelectromechanical Systems Research Unit (CMEMS-UMinho), Campus de Azurém, University of Minho, 4800-058 Guimarães, Portugal
Integrated Micro and Nanotechnologies, INL International Iberian Nanotechnology Laboratory, 4715-330 Braga, Portugal
Funding
Fundação para a Ciência e a Tecnologia · European Regional Development Fund
References (26)
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