Fine Purification of Monoisotopic Silanes 28SiH4 , 29SiH4 , and 30SiH4 via Distillation
Source abstract
Abstract
High-purity isotopically enriched (99.98% 28Si, 99.57% 29Si, and 99.83% 30Si) silane samples are prepared for the first time. The total hydrocarbon content of the samples is no higher than 0.1–0.3 ppm. The concentration of electroactive impurities in the silicon prepared from the purified monoisotopic silane is below 1015 cm–3.
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Research context
OpenAlex topics: Zeolite Catalysis and Synthesis · Catalytic Processes in Materials Science · Catalysis and Hydrodesulfurization Studies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (16)
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1. Smith, I.L. and Nelson, G.E., US Patent 4532120, 1985.
2. Bush, E.L, UK Patent 832570, 1960.
3. Kuratomi, T. and Yatsurugi, Y., Jpn. Patent Application 7341439, 1973.
4. Scull, H.M. and Laurent, S.M, US Patent 4554141, 1985.
5. Yusa, A., Jatsurudi, J., and Takaishi, T., Ultrahigh Purification of Silane for Semiconductor Silicon, J. Electrochem. Soc., 1975, vol. 122, no. 12, pp. 1700–1705.10.1149/1.2134113 ↗
6. Ishizuka Hiroshi, Jpn. Patent 12061, 1967.
7. Devyatykh, G.G., Balabanov, V.V., and Zvereva, V.I., USSR Inventor's Certificate no. 614615, 1976, Byull. Izobret., 2003, no. 33.
8. Balabanov, V.V., Liverko, V.N., and Mochalov, G.M., Physicochemical Principles of Removing High-Boiling Impurities from Silane, VI Vsesoyuznaya konferentsiya po metodam polucheniya i analiza vysokochistykh veshchestv (VI All-Union Conf. on Techniques for the Preparation and Analysis of High-Purity Substances), Gorki, 1981, p. 44.
9. Vorotyntsev, V.M., Mochalov, G.M., Balabanov, V.V., et al., Study of Liquid-Vapor Equilibria in Systems of Silane with Ethylene, Ethane, Ethanol, Triethoxysilane, and Tetraethoxysilane Microimpurities, Vysokochist. Veshchestva, 1987, no. 1, pp. 53–57.
10. Devyatykh, G.G. and Zorin, L.D., Letuchie neorganicheskie gidridy osoboi chistoty (Ultrapure Volatile Inorganic Hydrides), Moscow: Nauka, 1974.
11. Devyatykh, G.G., Zorin, A.D., and Frolov, I.A., Fine Purification of Volatile Inorganic Hydrides via Distillation, in Metody polucheniya i analiza veshchestv osoboi chistoty (Techniques for the Preparation and Analysis of High-Purity Substances), Moscow: Nauka, 1970, pp. 42–50.
12. Petrik, A.G., Shvartsman, L.Ya., Semenov, A.I., and Makarov, G.G., Special Features of Distillation Involving the Formation of Suspended Particles, Tr. Khim. Khim. Tekhnol., 1973, no. 4, pp. 34–35.
13. Devyatykh, G.G., Gusev, A.V., Vorotyntsev, V.M., and Elliev, Yu.E., Removal of Suspended Particles from Substances by Distillation, Dokl. Akad. Nauk SSSR, 1977, vol. 235, no. 2, pp. 351–353.
14. Devyatykh, G.G., Agliulov, N.Kh., Churbanov, M.F., et al., USSR Inventor's Certificate no. 1032708, 1983, Byull. Izobret., 2003, no. 33.
15. Devyatykh, G.G., Dianov, E.M., Bulanov, A.D., et al., Preparation of High-Purity Monoisotopic Silane: 28SiH4, 29SiH4, and 30SiH4, Dokl. Akad. Nauk, 2003, vol. 391, no. 5, pp. 638–639.
16. Devyatykh, G.G., Rodchenkov, V.I., Murskii, G.L., et al., Effect of the Withdrawal Procedure on Distillation Efficiency, Dokl. Akad. Nauk SSSR, 1983, vol. 273, no. 2, pp. 397–400.