Annealing effect on the structure, phase composition, and nanohardness of titanium/fullerite films
Source abstract
Abstract
The effect of heat treatment on the structure, phase composition, and nanohardness of titanium/fullerite films of different thicknesses produced by thermal evaporation in vacuum has been studied using atomic force microscopy, X-ray diffraction, and nanoindentation. The results demonstrate that annealing at 570 K increases the grain size of the films and leads to the formation of a Ti x C60 phase. The nanohardness of the annealed films varies little with depth owing to the interdiffusion of Ti atoms and C60 molecules.
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Fullerene Chemistry and Applications · Metal and Thin Film Mechanics
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References (13)
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