journal article·2022-04-14Open access

Optical Accelerometers for Detecting Low-Frequency Micro-Vibrations

Ying-Jun Lei, Rui-Jun Li, Lian-Sheng Zhang, Peng-Hao Hu, Qiang-Xian Huang

Applied Sciences· Volume 12· Issue 8

Abstract

Optical accelerometers are high-precision inertial sensors that use optical measurement technology to achieve high-precision and electromagnetic interference-resistant acceleration measurements. With the intensive research and development of optical accelerometers in recent years, their applications in inertial navigation, structural health monitoring, precision vibration isolation systems, wind turbine fault monitoring, earthquake monitoring, and other low-frequency vibration detection have flourished. Optical accelerometers have various schemes; however, their characteristics vary considerably due to different optical modulation schemes. This study aims to address the lack of systematic evaluation of currently available low-frequency optical accelerometers. Optical accelerometers can be classified into four categories in accordance with their optical modulation schemes: optical path-, optical intensity-, optical phase-, and optical wave-length-modulated accelerometers. The typical performance, advantages and disadvantages, and possible application scenarios of various optical accelerometers are summarized. This study also presents the current status and trends of low-frequency optical accelerometers in consideration of the growing demand for high-precision, low-frequency acceleration measurements.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Advanced Fiber Optic Sensors · Photonic and Optical Devices · Geophysics and Sensor Technology

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China

Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei 230009, China

Funding

National Key R&D Program of China · National Natural Science Foundation of China

References (95)

Show source-provided references
1. Review on the use of piezoelectric materials for active vibration, noise, and flow control10.1088/1361-665X/ab7541 ↗
2. Effective properties and nonlinearities in 1-3 piezocomposites: A comprehensive review10.1088/1361-665X/ab350a ↗
3. D’Alessandro, A., Scudero, S., and Vitale, G. (2019). A review of the capacitive MEMS for seismology. Sensors, 19.10.3390/s19143093 ↗
4. Signal integrity in capacitive and piezoresistive single-and multi-axis MEMS gyroscopes under vibrations10.1016/j.microrel.2017.06.019 ↗
5. Piezoresistive carbon foams in sensing applications10.3389/fmats.2019.00093 ↗
6. Optimal design of high-g MEMS piezoresistive accelerometer based on Timoshenko beam theory10.1007/s00542-017-3585-4 ↗
7. Li, R., Lei, Y., Chang, Z., Zhang, L., and Fan, K. (2018). Development of a high-sensitivity optical accelerometer for low-frequency vibration measurement. Sensors, 18.10.3390/s18092910 ↗
8. Venkateshan, S.P. (2015). Mechanical Measurements, Springer.10.1002/9781119115571 ↗
9. Noureldin, A., Karamat, T., and Georgy, J. (2013). Fundamentals of Inertial Navigation, Satellite-Based Positioning and Their Integration, Springer. [1st ed.].10.1007/978-3-642-30466-8 ↗
10. Optical fiber accelerometer system for structural dynamic monitoring10.1109/JSEN.2009.2026548 ↗
11. Tilted fiber grating accelerometer incorporating an abrupt biconical taper for cladding to core recoupling10.1364/OE.17.020651 ↗
12. Vibration isolation of precision equipment10.1016/0141-6359(94)00006-L ↗
13. Vibration isolation of precision machine tools and instruments10.1016/S0007-8506(07)63257-0 ↗
14. Research on measurement of low-frequency and micro-amplitude of vibration in active damping of platform
15. Gearbox condition monitoring in wind turbines: A review10.1016/j.ymssp.2018.03.052 ↗
16. A brief status on condition monitoring and fault diagnosis in wind energy conversion systems10.1016/j.rser.2009.06.031 ↗
17. Performance assessment of wind turbine gearboxes using in-service data: Current approaches and future trends10.1016/j.rser.2015.04.139 ↗
18. Teng, W., Ding, X., Tang, S., Xu, J., Shi, B., and Liu, Y. (2021). Vibration analysis for fault detection of wind turbine drivetrains—A comprehensive investigation. Sensors, 21.10.3390/s21051686 ↗
19. Potential advantages of a strong-motion velocity meter over a strong-motion accelerometer10.1785/gssrl.73.3.332 ↗
20. Development of an optical accelerometer with a DVD pick-up head10.1088/0957-0233/16/12/014 ↗
21. Development of an optical accelerometer for low-frequency vibration using the voice coil on a DVD pickup head10.1088/0957-0233/19/8/084012 ↗
22. A low-frequency micro accelerometer based on three-lobed leaf spring and a focus probe
23. Modeling and improvement of a low-frequency micro-accelerometer10.1063/5.0024940 ↗
24. Li, R., Xiang, M., He, Y., Fan, K., Cheng, Z., Huang, Q., and Zhou, B. (2016). Development of a high-precision touch-trigger probe using a single sensor. Appl. Sci., 6.10.3390/app6030086 ↗
25. Correlation-steered scanning for scanning probe microscopes to overcome thermal drift for ultra-long time scanning10.1016/j.ultramic.2016.03.013 ↗
26. Design and verification of micro/nano-probes for coordinate measuring machines10.1007/s41871-018-0025-8 ↗
27. Two-dimensional optical accelerometer based on commercial DVD pick-up head10.1088/0957-0233/18/1/033 ↗
28. Cheng, Z., Liu, L., Xu, P., Li, R., Fan, K., Li, H., and Wei, Y. (2019). Modeling and Optimal Design for a High Stability 2D Optoelectronic Angle Sensor. Sensors, 19.10.3390/s19204409 ↗
29. A high-precision two-dimensional micro-accelerometer for low-frequency and micro-vibrations10.1016/j.precisioneng.2020.10.011 ↗
30. Theoretical analysis of 2D acceleration laser sensor and several design parameters10.1016/S0030-3992(03)00024-0 ↗
31. A cantilever optical-fiber accelerometer10.1016/S0924-4247(98)00066-1 ↗
32. Barbosa, F., Borin, F., Arakaki, A., Aguiar, J., and Chaves, C. (2005, January 25). A novel optical accelerometer. Proceedings of the International Conference on Microwave and Optoelectronics, Brasilia, Brazil. SBMO/IEEE MTT-S.
33. Development of a micro-opto-mechanical accelerometer based on intensity modulation10.1007/s00542-003-0324-9 ↗
34. Integrated polymer optical accelerometer10.1109/LPT.2005.846458 ↗
35. SU-8 optical accelerometers10.1109/JMEMS.2006.885845 ↗
36. Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation10.1016/S0924-4247(98)00065-X ↗
37. Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators10.1016/j.sna.2007.11.007 ↗
38. A novel optical accelerometer10.1109/55.382228 ↗
39. Wu, Y., Kao, Y., Chao, P., Wey, C., Sauter, T., Eka, F., and Pandey, R. (2018). Design and Implementation of OLED Driving and OPD Readout Circuitry for an Optical Vibration Sensor. IEEE Sens., 1–4.10.1109/ICSENS.2018.8589652 ↗
40. Carr, D., Sullivan, J., and Friedmann, T. (2004, January 6–10). Femtophotonics: Optical transducers utilizing novel subwavelength dual layer grating structure. Proceedings of the Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, SC, USA.10.31438/trf.hh2004.23 ↗
41. Laterally deformable nanomechanical zeroth-order gratings: Anomalous diffraction studied by rigorous coupled-wave analysis10.1364/OL.28.001636 ↗
42. In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor10.1016/j.sna.2008.03.017 ↗
43. A high stability optical shadow sensor with applications for precision accelerometers10.1109/JSEN.2018.2818066 ↗
44. Comparative study of novel micromachined accelerometers employing MIDOS10.1016/S0924-4247(99)00253-8 ↗
45. Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing10.1016/S0924-4247(99)00357-X ↗
46. Measurement of the Earth tides with a MEMS gravimeter10.1038/nature17397 ↗
47. A high-sensitivity MEMS gravimeter with a large dynamic range10.1038/s41378-019-0089-7 ↗
48. Design and numerical performance analysis of a microgravity accelerometer with quasi-zero stiffness10.1088/1361-665X/ab8838 ↗
49. Design of a compliant-cylinder-type fiber-optic accelerometer: Theory and experiment10.1364/AO.34.003009 ↗
50. Michelson fiberoptic accelerometer10.1063/1.1149070 ↗
51. Broadband Michelson fiber-optic accelerometer10.1364/AO.38.000628 ↗
52. Theoretical and experimental demonstrations of a microfiber-based flexural disc accelerometer10.1364/OL.36.003669 ↗
53. High-responsivity fiber-optic flexural disk accelerometers10.1109/50.871700 ↗
54. Cantilever fiber-optic accelerometer based on modal interferometer10.1109/LPT.2015.2432833 ↗
55. Measurements of mechanical vibrations at magnetic cores of power transformers with fiber-optic interferometric intrinsic sensor10.1109/2944.892619 ↗
56. Rochus, V., Westerveld, W.J., Figeys, B., Figeys, B., Rottenberg, X., and Jansen, R. (2019, January 24–27). Simulation and Design of an Optical Accelerometer. Proceedings of the 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Hannover, Germany.10.1109/EuroSimE.2019.8724569 ↗
57. A 3-component fiber-optic accelerometer for well logging10.1016/j.optcom.2004.02.008 ↗
58. Practical fiber-optic-based submicro-g accelerometer free from source and environmental perturbations10.1364/OL.14.001155 ↗
59. MEMS Fabry–Pérot optical accelerometer employing mechanical amplification via a V-beam structure10.1016/j.sna.2013.08.002 ↗
60. High sensitivity optomechanical reference accelerometer over 10 kHz10.1063/1.4881936 ↗
61. Extrinsic Fabry–Pérot cantilever accelerometer based on micromachined 45° angled fiber10.1109/JLT.2017.2760901 ↗
62. Fiber optical accelerometer based on 45 degrees Fabry-Perot cavity
63. A high-resolution fiber optic accelerometer based on intracavity phase-generated carrier (PGC) modulation10.1088/0957-0233/22/1/015303 ↗
64. Optical accelerometer based on grating interferometer with phase modulation technique10.1364/AO.51.007005 ↗
65. Nanometer-scale displacement sensor based on phase-sensitive diffraction grating10.1364/AO.50.001413 ↗
66. Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer10.1109/JMEMS.2017.2693341 ↗
67. Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation10.1364/AO.54.004188 ↗
68. Lu, Q., Bai, J., Wang, K., Chen, P., Fang, W., and Wang, C. (2018). Single Chip-based nano-optomechanical accelerometer based on subwavelength grating pair and rotated serpentine springs. Sensors, 18.10.3390/s18072036 ↗
69. Noise suppression of a micro-grating accelerometer based on the dual modulation method10.1364/AO.56.010003 ↗
70. Yao, Y., Pan, D., Wang, J., Dong, T., Guo, J., Wang, C., Geng, A., Fang, W., and Lu, Q. (2021). Design and Modification of a High-Resolution Optical Interferometer Accelerometer. Sensors, 21.10.3390/s21062070 ↗
71. Photosensitivity in optical fiber waveguides: Application to reflection filter fabrication10.1063/1.89881 ↗
72. Narrow-band Bragg reflectors in optical fibers10.1364/OL.3.000066 ↗
73. Hybrid fiber Bragg grating sensor for vibration and temperature monitoring of a train bearing10.3788/COL201816.070604 ↗
74. High-frequency optical fiber Bragg grating accelerometer10.1109/JSEN.2018.2833885 ↗
75. Highly sensitive FBG seismometer with a 3D-printed hexagonal configuration10.1109/JLT.2020.2991667 ↗
76. Experimental demonstration of a fiber Bragg grating accelerometer10.1109/68.544716 ↗
77. Flexural beam-based fiber Bragg grating accelerometers10.1109/68.726764 ↗
78. Fiber Bragg grating accelerometer for buildings and civil infrastructures. Smart Structures and Materials 2001: Smart Systems for Bridges, Structures, and Highways
79. A robust and compact fiber Bragg grating vibration sensor for seismic measurement10.1109/JSEN.2011.2166258 ↗
80. Fiber Bragg grating accelerometer based on L-shaped rigid beam and elastic diaphragm for low-frequency vibration measurement10.3788/AOS201535.1206005 ↗
81. Development of a multi-point polarization-based vibration sensor10.1364/OE.21.005606 ↗
82. Linearity considerations in polarization-based vibration sensors10.1364/AO.51.006997 ↗
83. VCSEL-based tilted fiber grating vibration sensing system10.1109/LPT.2010.2052797 ↗
84. Fiber Bragg grating accelerometer with enhanced sensitivity10.1016/j.sna.2011.10.026 ↗
85. Design optimization of fiber Bragg grating accelerometer for maximum sensitivity10.1016/j.sna.2013.01.039 ↗
86. Cantilever optical vibrometer using fiber Bragg grating10.1117/1.1615584 ↗
87. Fiber Bragg grating sensor for simultaneous measurement of displacement and temperature10.1364/OL.25.001141 ↗
88. Low-frequency fiber Bragg grating accelerometer based on a double-semicircle cantilever10.1016/j.yofte.2014.01.006 ↗
89. Large frequency range and high sensitivity fiber Bragg grating accelerometer based on double diaphragms10.1109/JSEN.2013.2296932 ↗
90. Photonic crystals: Putting a new twist on light10.1038/386143a0 ↗
91. A proposal for an optical MEMS accelerometer relied on wavelength modulation with one dimensional photonic crystal10.1109/JLT.2016.2597539 ↗
92. A proposal for a high-sensitivity optical MEMS accelerometer with a double-mode modulation system10.1109/JLT.2020.3023038 ↗
93. A novel all-optical sensor design based on a tunable resonant nanocavity in photonic crystal microstructure applicable in MEMS accelerometers10.1007/s13320-020-0607-0 ↗
94. An optical MEMS accelerometer based on a two-dimensional photonic crystal add-drop filter10.1109/JLT.2017.2706140 ↗
95. Sensing Techniques and Interrogation Methods in Optical MEMS Accelerometers: A Review10.1109/JSEN.2022.3149662 ↗