journal article·2018-12-04Open access

Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application

Xinghui Li, Yaping Shi, Xiang Xiao, Qian Zhou, Guanhao Wu, Haiou Lu, Kai Ni

Applied Sciences· Volume 8· Issue 12

Abstract

In this research, a key optical component for multi-degree-of-freedom (MDOF) surface encoder was designed, fabricated and evaluated. In a MDOF grating interferometry system, there are four diffraction beams from a two-axis scale grating and reference grating, respectively. For further modulation, these beams will propagate more than 100 mm, which makes paralleling these beams necessary. In previous research, collimation lens, separate prisms and a home fabricated diffraction device by combining four separate one-axis line gratings in a glass substrate have been demonstrated. However, large power loss and assembly complicity makes these techniques less competitive. For solving this problem, this research proposed a new lens module, which is an improved type prism, quadrangular frustum pyramid (QFP) prism. The prism is designed in such a way that these four reflected beams from the grating are symmetrically incident into the prism through the upper surface, total reflected on the inner sides of the prism, and then parallel getting through the bottom surface. A prism that allows an incident beam diameter of 1 mm and four paralleling beams with a 10 mm distance between the two diffraction beams along one direction was designed, fabricated and tested. Testing results based on an entire grating interferometry system verified that the proposal in this research is greatly effective in beam paralleling in terms of less power loss and high paralleling and greatly reduces the assembly complicity, which will eventually be beneficial for grating interferometry application.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Advanced Measurement and Metrology Techniques · Optical measurement and interference techniques · Surface Roughness and Optical Measurements

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Division of Advanced Manufacturing, Graduate School at Shenzhen, Tsinghua University, Tsinghua Campus, Xili University Town, Shenzhen 518055, China

Department of Precision Instrument, Tsinghua University, Haidian District, Beijing 100084, China

Funding

the National Natural Science Foundation of China · the Youth funding of Shenzhen Graduate of Tsinghua University · the Shenzhen fundamental research funding · the National key research and development program

References (16)

Show source-provided references
1. Development and applications of Sumitomo precision stage technologies for FPD process10.2493/jjspe.78.117 ↗
2. (2018). Surface-Motor Driven Stage Series, Mechatronics Division, Sumitomo Heavy Industries Ltd.
3. Measurement technologies for precision positioning10.1016/j.cirp.2015.05.009 ↗
4. A two-degree-of-freedom linear encoder with a mosaic scale grating10.1504/IJNM.2011.039964 ↗
5. A three-axis displacement sensor with nanometric resolution10.1016/j.cirp.2007.05.126 ↗
6. The Abbe principle revisited: An updated interpretation10.1016/0141-6359(79)90037-0 ↗
7. Geometric error measurement and compensation of machines-An update10.1016/j.cirp.2008.09.008 ↗
8. Two-dimensional displacement sensing using a cross diffraction grating scheme
9. Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness10.1016/j.precisioneng.2009.05.008 ↗
10. A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage10.1016/j.precisioneng.2013.03.005 ↗
11. A modified molre Interterometer for three-dimensional displacement measurement
12. A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement10.1016/j.precisioneng.2012.04.005 ↗
13. Measurement of six-degree-of-freedom planar motions by using a multi-probe surface encoder10.1117/1.OE.53.12.122405 ↗
14. Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder10.1016/S0141-6359(03)00028-X ↗
15. A three-axis autocollimator for detection of angular error motions of a precision stage10.1016/j.cirp.2011.03.052 ↗
16. Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating10.1364/OE.24.021378 ↗