MEMS Acoustic Emission Sensors
Source abstract
Abstract
This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Advanced MEMS and NEMS Technologies · Ultrasonics and Acoustic Wave Propagation
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Civil, Materials and Environmental Engineering, University of Illinois at Chicago, Chicago, IL 60607, USA
Funding
National Science Foundation
References (52)
Show source-provided references
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