Si Photonics for Practical LiDAR Solutions
Source abstract
Abstract
In the article the authors discuss light detection and ranging (LiDAR) for automotive applications and the potential roles Si photonics can play in practice. The authors review published research work on Si photonics optical phased array (OPA) and other relevant devices in the past decade with in-depth technical analysis with respect to practical system design considerations. The commercialization status of certain LiDAR technologies is briefly introduced.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advanced Optical Sensing Technologies · Optical Coherence Tomography Applications · Photonic and Optical Devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Chinese Academy of Sciences, Xi’an Institute of Optics and Precision Mechanics, Xi’an 710119, China
Funding
National Natural Science Foundation of China · the Strategic Priority Research Program of the Chinese Academy of Sciences
References (89)
Show source-provided references
1. A roadmap for nanophotonics10.1038/nphoton.2007.84 ↗
2. High-performance silicon photonics technology for telecommunications applications10.1088/1468-6996/15/2/024603 ↗
3. Doerr, C. (2015). Silicon photonic integration in telecommunications. Front. Phys., 3.10.3389/fphy.2015.00037 ↗
4. Roadmap on silicon photonics10.1088/2040-8978/18/7/073003 ↗
5. Dong, P., Melikyan, A., and Kim, K. (2018, January 2–6). Silicon photonic integrated circuits for telecom and datacom applications. Proceedings of the 2018 23rd Opto-Electronics and Communications Conference (OECC), Jeju Island, Korea.10.1109/OECC.2018.8730121 ↗
6. Highly integrated optical phased arrays: Photonic integrated circuits for optical beam shaping and beam steering10.1515/nanoph-2015-0152 ↗
7. Monolithic Single-Photon Avalanche Diodes: SPADs10.1007/978-3-642-18443-7_7 ↗
8. Süss, A., Rochus, V., Rosmeulen, M., and Rottenberg, X. (2016, January 3). Benchmarking time-of-flight based depth measurement techniques. Proceedings of the Smart Photonic and Optoelectronic Integrated Circuits XVIII, San Francisco, CA, USA.10.1117/12.2212478 ↗
9. Application of lidar techniques to time-of-flight range imaging10.1364/AO.54.009654 ↗
10. (2019, September 05). Valeo 2017 Activity and Sustainable Development Report. Available online: https://www.valeo.com/wp-content/uploads/2018/05/Valeo_Rapport_Annuel_2017_en.pdf.
11. Jarvis, A. (2019, September 05). Velodyne Lidar Press Release, MARCH 28. Available online: https://velodynelidar.com/newsroom/velodyne-achieves-half-a-billion-dollars-in-lidar-sensors-shipped/.
12. Monolithic integration of InGaAs/InP DFB lasers and InGaAs/InAlAs MQW optical modulators10.1049/el:19860166 ↗
13. Pulikkaseril, C., and Lam, S. (2019, January 3–7). Laser eyes for driverless cars: The road to automotive LIDAR. Proceedings of the Optical Fiber Communication Conference, Tu3D.2, San Diego, CA, USA.10.1364/OFC.2019.Tu3D.2 ↗
14. Model based vehicle detection and tracking for autonomous urban driving10.1007/s10514-009-9115-1 ↗
15. Optical phased array technology10.1109/5.482231 ↗
16. Shi, L., McManamon, P.F., Bryant, D., Wall, B., Groom, M., and Bos, P.J. (2008, January 19–23). Beam steering using a liquid crystal optical phase plate with a variable in-plane gradient. Proceedings of the Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, Rochester, NY, USA.10.1364/FIO.2008.FThU7 ↗
17. Boeuf, F., Crémer, S., Vulliet, N., Pinguet, T., Mekis, A., Masini, G., Verslegers, L., Sun, P., Ayazi, A., and Hon, N. (2013, January 9–11). A multi-wavelength 3D-compatible silicon photonics platform on 300 mm SOI wafers for 25Gb/s applications. Proceedings of the 2013 IEEE International Electron Devices Meeting, Washington, DC, USA.10.1109/IEDM.2013.6724623 ↗
18. Lim, A.E., Tsung-Yang, L., Junfeng, S., Chao, L., Fang, Q., Xiaoguang, T., Ning, D., Kok Kiong, C., Tern, R.P.C., and Chuan, P. (2014, January 9–13). Path to silicon photonics commercialization: 25 Gb/s platform development in a CMOS manufacturing foundry line. Proceedings of the OFC 2014, San Francisco, CA, USA.
19. Silicon photonics integrated circuits: A manufacturing platform for high density, low power optical I/O’s10.1364/OE.23.009369 ↗
20. Mogami, T., Horikawa, T., Kinoshita, K., Sasaki, H., Morito, K., and Kurata, K. (2015, January 18–21). A 300 mm Si photonics platform for optical interconnection. Proceedings of the 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), Grenoble, France.10.1109/IITC-MAM.2015.7325665 ↗
21. Open-Access Silicon Photonics: Current Status and Emerging Initiatives10.1109/JPROC.2018.2878686 ↗
22. 300-mm Monolithic Silicon Photonics Foundry Technology10.1109/JSTQE.2019.2908790 ↗
23. Szelag, B., Blampey, B., Ferrotti, T., Reboud, V., Hassan, K., Malhouitre, S., Grand, G., Fowler, D., Brision, S., and Bria, T. (2016, January 13). Multiple wavelength silicon photonic 200 mm R+D platform for 25 Gb/s and above applications. Proceedings of the Silicon Photonics and Photonic Integrated Circuits V, Brussels, Belgium.10.1117/12.2228744 ↗
24. Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform10.1109/JLT.2015.2481602 ↗
25. Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits10.1109/JLT.2016.2617624 ↗
26. Wilmart, Q., el Dirani, H., Tyler, N., Fowler, D., Malhouitre, S., Garcia, S., Casale, M., Kerdiles, S., Hassan, K., and Monat, C. (2019). A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications. Appl. Sci., 9.10.3390/app9020255 ↗
27. Muñoz, P., Micó, G., Bru, A.L., Pastor, D., Pérez, D., Doménech, D.J., Fernández, J., Baños, R., Gargallo, B., and Alemany, R. (2017). Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications. Sensors, 17.10.3390/s17092088 ↗
28. Silicon Nitride in Silicon Photonics10.1109/JPROC.2018.2861576 ↗
29. Multi-Micron Silicon Photonics Platform for Highly Manufacturable and Versatile Photonic Integrated Circuits10.1109/JSTQE.2019.2911432 ↗
30. Thermo-Optic Characterization of Silicon Nitride Resonators for Cryogenic Photonic Circuits10.1109/JPHOT.2016.2561622 ↗
31. The Thermo Optic Coefficient of Amorphous SiN Films in the Near-Infrared and Visible Regions and Its Experimental Determination10.7567/APEX.6.042402 ↗
32. Two-photon absorption and Kerr coefficients of silicon for 850–2200 nm10.1063/1.2737359 ↗
33. Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides10.1364/OE.16.012987 ↗
34. Nonlinear silicon nitride waveguides based on a PECVD deposition platform10.1364/OE.26.009645 ↗
35. CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects10.1038/nphoton.2009.259 ↗
36. Optical Power Handling Capacity of Low Loss Optical Fibers as Determined by Stimulated Raman and Brillouin Scattering10.1364/AO.11.002489 ↗
37. Thermo-optic coefficient of silicon at 1550 nm and cryogenic temperatures10.1063/1.4738989 ↗
38. An all-silicon Raman laser10.1038/nature03273 ↗
39. Nonlinear optical phenomena in silicon waveguides: Modeling and applications10.1364/OE.15.016604 ↗
40. Britun, N., and Nikiforov, A. (2017). Principles and Early Historical Development of Silicon Avalanche and Geiger-Mode Photodiodes, IntechOpen. Photon Counting—Fundamentals and Applications.
41. (2019, September 05). Technology, Quanergy Systems, Inc. Available online: https://quanergy.com/technology-2/.
42. (2019, September 05). Automotive LiDAR Market Report from Woodside Capital Partners and Yole Développement, April 2018. Available online: https://www.osa.org/en-us/industry/industry_intelligence/publications_reports/automotive_lidar_market_report/.
43. Photonic Integrated Circuit-Based FMCW Coherent LiDAR10.1109/JLT.2018.2840223 ↗
44. (2019, September 05). Blackmore Sensors and Analytics, Inc. Available online: https://blackmoreinc.com.
45. (2019, September 05). Analog Photonics LLC. Available online: http://www.analogphotonics.com/.
46. (2019, September 05). ASTM G173-03(2012). Available online: http://www.astm.org/cgi-bin/resolver.cgi?G173-03(2012).
47. Spatial optical beam steering with an AlGaAs integrated phased array10.1364/AO.32.003220 ↗
48. Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator10.1364/OL.34.001477 ↗
49. Two-dimensional optical phased array antenna on silicon-on-insulator10.1364/OE.18.013655 ↗
50. Two-dimensional free-space beam steering with an optical phased array on silicon-on-insulator10.1364/OE.19.021595 ↗
51. Doylend, J., Heck, M.R., Bovington, J., Peters, J., Coldren, L., and Bowers, J. (2012, January 4–8). Free-space Beam Steering in Two Dimensions Using a Silicon Optical Phased Array. Proceedings of the Optical Fiber Communication Conference, Los Angeles, CA, USA.10.1364/OFC.2012.OM2J.1 ↗
52. 1 × 12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane10.1063/1.3619847 ↗
53. Hybrid III/V silicon photonic source with integrated 1D free-space beam steering10.1364/OL.37.004257 ↗
54. Large-Scale Silicon Photonic Circuits for Optical Phased Arrays10.1109/JSTQE.2013.2293316 ↗
55. Guo, W., Binetti, P.R.A., Masanovic, M.L., Johansson, L.A., and Coldren, L.A. (2013, January 8–12). Large-scale InP photonic integrated circuit packaged with ball grid array for 2D optical beam steering. Proceedings of the 2013 IEEE Photonics Conference, Bellevue, WA, USA.10.1109/IPCon.2013.6656463 ↗
56. Abiri, B., Aflatouni, F., Rekhi, A., and Hajimiri, A. (2014, January 9–14). Electronic Two-Dimensional Beam Steering for Integrated Optical Phased Arrays. Proceedings of the Optical Fiber Communication Conference, San Francisco, CA, USA.10.1364/OFC.2014.M2K.7 ↗
57. Yaacobi, A., Sun, J., Moresco, M., Leake, G., Coolbaugh, D., and Watts, M.R. (2014, January 8–13). On chip wide angle beam steering. Proceedings of the 2014 Conference on Lasers and Electro-Optics (CLEO)—Laser Science to Photonic Applications, San Jose, CA, USA.10.1364/CLEO_SI.2014.STh3M.2 ↗
58. Integrated phased array for wide-angle beam steering10.1364/OL.39.004575 ↗
59. On-chip silicon optical phased array for two-dimensional beam steering10.1364/OL.39.000941 ↗
60. Hulme, J.C., Doylend, J.K., Heck, M.J.R., Peters, J.D., Davenport, M.L., Bovington, J.T., Coldren, L.A., and Bowers, J.E. (2014, January 8). Fully integrated hybrid silicon free-space beam steering source with 32-channel phased array. Proceedings of the Smart Photonic and Optoelectronic Integrated Circuits XVI, Santa Barbara, CA, USA.10.1117/12.2044820 ↗
61. Fully integrated hybrid silicon two dimensional beam scanner10.1364/OE.23.005861 ↗
62. Monolithic optical phased-array transceiver in a standard SOI CMOS process10.1364/OE.23.006509 ↗
63. Poulton, C.V., Yaacobi, A., Su, Z., Byrd, M.J., and Watts, M.R. (2016, January 18–20). Optical Phased Array with Small Spot Size, High Steering Range and Grouped Cascaded Phase Shifters. Proceedings of the Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF), Vancouver, BC, Canada.10.1364/IPRSN.2016.IW1B.2 ↗
64. Coherent solid-state LIDAR with silicon photonic optical phased arrays10.1364/OL.42.004091 ↗
65. High-resolution aliasing-free optical beam steering10.1364/OPTICA.3.000887 ↗
66. Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths10.1364/OL.42.000021 ↗
67. Zhao, C., Zhang, H., Zheng, Z., Peng, C., and Hu, W. (2017, January 14–19). Silicon optical-phased-array prototypes using electro-optical phase shifters. Proceedings of the 2017 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.10.1364/CLEO_SI.2017.SM1O.4 ↗
68. Miller, S.A., Phare, C.T., Chang, Y., Ji, X., Gordillo, O.A.J., Mohanty, A., Roberts, S.P., Shin, M.C., Stern, B., and Zadka, M. (2018, January 13–18). 512-Element Actively Steered Silicon Phased Array for Low-Power LIDAR. Proceedings of the 2018 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.10.1364/CLEO_AT.2018.JTh5C.2 ↗
69. Phare, C.T., Shin, M.C., Sharma, J., Ahasan, S., Krishnaswamy, H., and Lipson, M. (2018, January 13–18). Silicon Optical Phased Array with Grating Lobe-Free Beam Formation over 180 Degree Field of View. Proceedings of the 2018 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.10.1364/CLEO_SI.2018.SM3I.2 ↗
70. A Monolithically Integrated Large-Scale Optical Phased Array in Silicon-on-Insulator CMOS10.1109/JSSC.2017.2757009 ↗
71. SiN integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength10.1364/OE.27.005851 ↗
72. Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering10.1364/OE.27.001929 ↗
73. Ince–Gaussian beams10.1364/OL.29.000144 ↗
74. (2019, September 05). HR80 Series, Cepton Technologies, Inc. Available online: https://www.cepton.com/hr80.html.
75. (2019, September 05). Christopher Palmer and Erwin Loewen, Diffraction Grating Handbook, Newport Corp. Available online: http://www.newport.com.
76. On-chip platform for a phased array with minimal beam divergence and wide field-of-view10.1364/OE.26.002528 ↗
77. Coupling gratings as waveguide functional elements10.1088/0963-9659/5/4/010 ↗
78. Sparse aperiodic arrays for optical beam forming and LIDAR10.1364/OE.25.002511 ↗
79. Zhang, L., Sun, X., Zhang, W., Wang, G., Feng, N., and Zhao, W. (2019). Compact optical phased array using a serial grating antenna design. arXiv.
80. Electrooptical effects in silicon10.1109/JQE.1987.1073206 ↗
81. Free-Carrier Electrorefraction and Electroabsorption Modulation Predictions for Silicon Over the 1–14- μm Infrared Wavelength Range10.1109/JPHOT.2011.2171930 ↗
82. Monolithic Polarization and Phase Diversity Coherent Receiver in Silicon10.1109/JLT.2009.2028656 ↗
83. Doerr, C., Chen, L., Vermeulen, D., Nielsen, T., Azemati, S., Stulz, S., McBrien, G., Xu, X.M., Mikkelsen, B., and Givehchi, M. (2014, January 9–13). Single-Chip Silicon Photonics 100-Gb/s Coherent Transceiver. Proceedings of the Optical Fiber Communication Conference: Postdeadline Papers, San Francisco, CA, USA.10.1364/OFC.2014.Th5C.1 ↗
84. Optical coherence tomography (OCT): A review10.1109/2944.796348 ↗
85. Kim, T., Bhargava, P., and Stojanović, V. (2018, January 13–18). Overcoming the Coherence Distance Barrier in Long-Range FMCW LIDAR. Proceedings of the 2018 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.10.1364/CLEO_SI.2018.STh3L.7 ↗
86. High-accuracy range-sensing system based on FMCW using low-cost VCSEL10.1364/OE.26.009285 ↗
87. Compact, lower-power-consumption wavelength tunable laser fabricated with silicon photonic wire waveguide micro-ring resonators10.1364/OE.17.014063 ↗
88. Koch, B.R., Norberg, E.J., Kim, B., Hutchinson, J., Shin, J.-H., Fish, G., and Fang, A. (2013, January 17–21). Integrated Silicon Photonic Laser Sources for Telecom and Datacom. Proceedings of the Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, Anaheim, CA, USA.10.1364/NFOEC.2013.PDP5C.8 ↗
89. Narrow Spectral Linewidth Silicon Photonic Wavelength Tunable Laser Diode for Digital Coherent Communication System10.1109/JSTQE.2016.2559418 ↗