Integrated Optical Phased Arrays for Beam Forming and Steering
Source abstract
Abstract
Integrated optical phased arrays can be used for beam shaping and steering with a small footprint, lightweight, high mechanical stability, low price, and high-yield, benefiting from the mature CMOS-compatible fabrication. This paper reviews the development of integrated optical phased arrays in recent years. The principles, building blocks, and configurations of integrated optical phased arrays for beam forming and steering are presented. Various material platforms can be used to build integrated optical phased arrays, e.g., silicon photonics platforms, III/V platforms, and III–V/silicon hybrid platforms. Integrated optical phased arrays can be implemented in the visible, near-infrared, and mid-infrared spectral ranges. The main performance parameters, such as field of view, beamwidth, sidelobe suppression, modulation speed, power consumption, scalability, and so on, are discussed in detail. Some of the typical applications of integrated optical phased arrays, such as free-space communication, light detection and ranging, imaging, and biological sensing, are shown, with future perspectives provided at the end.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Photonic and Optical Devices · Semiconductor Lasers and Optical Devices · Advanced Photonic Communication Systems
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Key Laboratory of Opto-Electronics Information Technology of Ministry of Education, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
Key Laboratory of Integrated Opto-Electronic Technologies and Devices in Tianjin, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
Funding
National Key R&D Program of China, National Natural Science Foundation of China (NSFC)
References (100+)
Show source-provided references
1. Novel phased array optical scanning device implemented using GaAs/AlGaAs technology10.1063/1.105270 ↗
2. Webb, G.W., Vernon, W., Sanchez, M.S., Rose, S.C., and Angello, S. (1999, January 17–19). Optically controlled millimeter wave antenna. Proceedings of the International Topical Meeting on Microwave Photonics, Melbourne, Australia.
3. Webb, G.W., Vernon, W., Sanchez, M.S., Rose, S.C., and Angello, S. (2000, January 11–13). Novel photonically controlled antenna for MMW communications. Proceedings of the International Topical Meeting on Microwave Photonics, Oxford, UK.
4. Igor, V.M., and Oleg, V.M. (2008). The brief elementary basics of antenna arrays. Basic Principles of Fresnel Antenna Arrays, Springer. [1st ed.].
5. Optical phased-array beam steering controlled by wavelength10.1364/AO.44.005429 ↗
6. Unequally spaced waveguide arrays for silicon nanomembrane-based efficient large angle optical beam steering10.1109/JSTQE.2009.2021956 ↗
7. Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator10.1364/OL.34.001477 ↗
8. Two-dimensional optical phased array antenna on silicon-on-insulator10.1364/OE.18.013655 ↗
9. 1 × 12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane10.1063/1.3619847 ↗
10. Large-scale nanophotonic phased array10.1038/nature11727 ↗
11. Long-range LiDAR and free-space data communication with high-performance optical phased arrays10.1109/JSTQE.2019.2908555 ↗
12. High-resolution aliasing-free optical beam steering10.1364/OPTICA.3.000887 ↗
13. Acoleyen, K.V. (2012). Nanophotonic Beam Steering Elements Using Silicon Technology for Wireless Optical Applications. [Ph.D. Thesis, Ghent University].
14. A single-chip optical phased array in a wafer-scale silicon photonics/CMOS 3D-integration platform10.1109/JSSC.2019.2934601 ↗
15. Chang, Y.C., Miller, S.A., Phare, C.T., Shin, M.C., Zadka, M., Roberts, S.P., Stern, B., Ji, X., Mohanty, A., and Gordillo, O.A.J. (2019, January 13). Scalable low-power silicon photonic platform for all-solid-state beam steering. Proceedings of the Micro- and Nanotechnology Sensors, Systems, and Applications XI, Baltimore, MD, USA.10.1117/12.2519803 ↗
16. A monolithically integrated large-scale optical phased array in silicon-on-insulator CMOS10.1109/JSSC.2017.2757009 ↗
17. Coherent solid-state LiDAR with silicon photonic optical phased arrays10.1364/OL.42.004091 ↗
18. Highly integrated optical phased arrays, photonic integrated circuits for optical beam shaping and beam steering10.1515/nanoph-2015-0152 ↗
19. Luo, X. (2019). Engineering Optics 2.0, a Revolution in Optical Theories, Materials, Devices and Systems, Springer. [1st ed.].10.1007/978-981-13-5755-8 ↗
20. Optical beam steering using a multichannel lithium tantalate crystal10.1364/AO.11.000613 ↗
21. Electrically controllable liquid crystal component for efficient light steering10.1109/JPHOT.2015.2402592 ↗
22. Mid-wave infrared beam steering based on high-efficiency liquid crystal diffractive waveplates10.1364/OE.25.022404 ↗
23. Optical multi-beam forming method based on a liquid crystal optical phased array10.1364/AO.56.009854 ↗
24. Arbitrary multiple beam forming by two cascaded liquid crystal optical phased arrays10.1364/OE.26.017066 ↗
25. He, Z., Gou, F., Chen, R., Yin, K., Zhan, T., and Wu, S. (2019). Liquid crystal beam steering devices, principles, recent advances, and future developments. Crystals, 9.10.3390/cryst9060292 ↗
26. Design of a large aperture, tunable, Pancharatnam phase beam steering device10.1364/OE.380952 ↗
27. Pu, M., Ma, X., Li, X., Hong, M., Wang, C., and Luo, X. (2018, January 26–29). Research review on the development of liquid crystal optical phased array device on the application of free space laser communication. Proceedings of the 9th International symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics, Chengdu, China.
28. Wide-angle structured light with a scanning MEMS mirror in liquid10.1364/OE.24.003479 ↗
29. 2D broadband beamsteering with large-scale MEMS optical phased array10.1364/OPTICA.6.000557 ↗
30. Low-power optical beam steering by microelectromechanical waveguide gratings10.1364/OL.44.000855 ↗
31. Wang, D., Watkins, C., and Xie, H. (2020). MEMS mirrors for LiDAR: A review. Micromachines, 11.10.3390/mi11050456 ↗
32. High speed, high power one-dimensional beam steering from a 6-element optical phased array10.1364/OE.20.017311 ↗
33. Electronic beam steering in monolithic grating surface-emitting diode laser arrays10.1063/1.100252 ↗
34. Thermally controlled Si photonic crystal slow light waveguide beam steering device10.1364/OE.26.011529 ↗
35. One-dimensional off-chip beam steering and shaping using optical phased arrays on silicon-on-insulator10.1109/JLT.2011.2171477 ↗
36. A design method of optical phased array with insufficient phase tuning range10.1109/JPHOT.2020.2970543 ↗
37. Polarization-division and spatial-division shared-aperture nanopatch antenna arrays for wide-angle optical beam scanning10.1364/OE.388951 ↗
38. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface10.1126/science.aaw6747 ↗
39. Polarization independent dielectric metasurface for infrared beam steering applications10.1038/s41598-019-47097-5 ↗
40. On-chip silicon optical phased array for two-dimensional beam steering10.1364/OL.39.000941 ↗
41. Chip-scale blue light phased array10.1364/OL.385201 ↗
42. Xie, W., Komljenovic, T., Huang, J., Davenport, M.L., and Bowers, J.E. (2019). Dense III-V/Si phase-shifter based optical phased array. arXiv.10.1109/ACP.2018.8596249 ↗
43. High sensitivity active flat optics optical phased array receiver with a two-dimensional aperture10.1364/OE.26.029983 ↗
44. Fast beam steering enabled by a chip-scale optical phased array with 8 × 8 elements10.1016/j.optcom.2020.125267 ↗
45. A nonuniform sparse 2-D large-FOV optical phased array with a low-power PWM drive10.1109/JSSC.2019.2896767 ↗
46. Eldada, L.A., Lee, E., and He, S. (2014, January 8). Fully integrated hybrid silicon free-space beam steering source with 32 channel phased array. Proceedings of the Smart Photonic and Optoelectronic Integrated Circuits XVI, San Francisco, CA, USA.
47. Free-space coherent optical communication with orbital angular, momentum multiplexing/demultiplexing using a hybrid 3D photonic integrated circuit10.1364/OE.22.000145 ↗
48. Hemmati, H., and Boroson, D.M. (2015, January 16). Free space optical communication link using a silicon photonic optical phased array. Proceedings of the Free-Space Laser Communication and Atmospheric Propagation XXVII, San Francisco, CA, USA.
49. Experimental demonstration of indoor infrared optical wireless communications with a silicon photonic integrated circuit10.1109/JLT.2018.2889252 ↗
50. Poulton, C.V., Vermeulen, D., Hosseini, E., Timurdogan, E., Su, Z., Moss, B., and Watts, M.R. (2017, January 18–21). Lens-free chip-to-chip free-space laser communication link with a silicon photonics optical phased array. Proceedings of the Frontiers in Optics 2017/Silicon Photonics II, Washington, DC, USA.10.1364/FIO.2017.FW5A.3 ↗
51. 32 Gbps data transmission with 2D beam-steering using a silicon optical phased array10.1109/LPT.2020.2998162 ↗
52. Nanophotonic projection system10.1364/OE.23.021012 ↗
53. Integrated visible light phased array system for autostereoscopic image projection10.1364/OL.43.003678 ↗
54. Ghost imaging using a large-scale silicon photonic phased array chip10.1364/OE.27.003817 ↗
55. Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers10.1364/OE.27.037400 ↗
56. Reconfigurable nanophotonic silicon probes for sub-millisecond deep-brain optical stimulation10.1038/s41551-020-0516-y ↗
57. Goodman, J.W. (1996). Introduction to Fourier Optics, McGraw-Hill, Inc.. [2nd ed.].
58. Large-scale silicon photonic circuits for optical phased arrays
59. Aliasing-free optical phased array beam-steering with a plateau envelope10.1364/OE.27.003354 ↗
60. Yu, Y., Zuo, C., and Qian, K. (2018, January 24). Optical phased array antenna with wide steering range using grating array superlattices. Proceedings of the Sixth International Conference on Optical and Photonic Engineering, Shanghai, China.
61. End-fire silicon optical phased array with half-wavelength spacing10.1063/1.5000741 ↗
62. SiN integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength10.1364/OE.27.005851 ↗
63. Serpentine optical phased arrays for scalable integrated photonic lidar beam steering10.1364/OPTICA.389006 ↗
64. Thermo-optic control of the longitudinal radiation angle in a silicon-based optical phased array10.1364/OL.44.000411 ↗
65. Large-scale silicon nitride nanophotonic phased arrays at infrared and visible wavelengths10.1364/OL.42.000021 ↗
66. Uniform emission, constant wavevector silicon grating surface emitter for beam steering with ultra-sharp instantaneous field-of-view10.1364/OE.25.019655 ↗
67. Two-dimensional dispersive off-chip beam scanner fabricated on silicon-on-insulator10.1109/LPT.2011.2159785 ↗
68. Integrated wavelength beam emitter on silicon for two-dimensional optical scanning10.1109/JPHOT.2019.2943641 ↗
69. A 1-D heterodyne lens-free optical phased array camera with reference phase shifting10.1109/JPHOT.2018.2871823 ↗
70. Silicon-based optical phased array using electro-optic p-i-n phase shifters10.1109/LPT.2019.2939550 ↗
71. Silicon nitride optical phased array based on a grating antenna enabling wavelength-tuned beam steering10.1364/OE.383304 ↗
72. Solid-state MWIR beam steering using optical phased array on germanium-silicon photonic platform10.1109/JPHOT.2019.2953222 ↗
73. Temperature dependence of the steering angles of a silicon photonic optical phased array10.1109/JPHOT.2020.2966618 ↗
74. N × N optical phased array with 2N phase shifters10.1364/OE.27.027183 ↗
75. Improved performance of optical phased arrays assisted by transparent graphene nanoheaters and air trenches10.1039/C7RA13154B ↗
76. Coupling strategies for silicon photonics integrated chips10.1364/PRJ.7.000201 ↗
77. Notaros, J., Li, N., Poulton, C.V., Su, Z., Byrd, M.J., Magden, E.S., and Watts, M.R. (2018, January 13–18). CMOS-compatible optical phased arrays with monolithically-integrated erbium lasers. Proceedings of the 2018 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.10.1364/CLEO_SI.2018.STu4B.2 ↗
78. CMOS-compatible optical phased array powered by a monolithically-integrated erbium laser10.1109/JLT.2019.2944607 ↗
79. Two-dimensional optical beam steering with InP-based photonic integrated circuits10.1109/JSTQE.2013.2238218 ↗
80. Guo, W., Binetti, P., Althouse, C., Ambrosius, H., Johansson, L.A., and Coldren, L.A. (2012, January 1–2). InP photonic integrated circuit for 2d optical beam steering. Proceedings of the Information Optoelectronics, Nanofabrication and Testing 2012, Wuhan, China.10.1364/IONT.2012.IF3B.2 ↗
81. Hybrid III/V silicon photonic source with integrated 1D free-space beam steering10.1364/OL.37.004257 ↗
82. Fully integrated hybrid silicon two dimensional beam scanner10.1364/OE.23.005861 ↗
83. Bowers, J.E., Huang, D., Jung, D., Norman, J., Tran, M.A., Wan, Y., Xie, W., and Zhang, Z. (2019, January 13–18). Realities and challenges of III-V/Si integration technologies. Proceedings of the 2019 Conference on Lasers and Electro-Optics (CLEO), San Diego, CA, USA.10.1364/OFC.2019.Tu3E.1 ↗
84. High-power, narrow-linewidth, miniaturized silicon photonic tunable laser with accurate frequency control10.1109/JLT.2019.2940589 ↗
85. Bowers, J.E., and Xie, W. (2019, January 8–10). High-performance III-V/Si phase shifter arrays for beam steering. Proceedings of the 2019 IEEE Photonics Society Summer Topical Meeting Series (SUM), Ft. Lauderdale, FL, USA.
86. Monolithic optical phased array transceiver in a stand SOI CMOS process10.1364/OE.23.006509 ↗
87. Two-dimensional apodized silicon photonic phased arrays10.1364/OL.39.000367 ↗
88. Design and fabrication of a SiN-Si dual-layer optical phased array chip10.1364/PRJ.387376 ↗
89. Silicon photonics co-integrated with silicon nitride for optical phased arrays10.7567/1347-4065/ab5b6d ↗
90. Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering10.1364/OE.27.001929 ↗
91. George, T., and Islam, M.S. (2019, January 13). Chip-scale optical phased arrays for inter-spacecraft communications. Proceedings of the Micro- and Nanotechnology Sensors, Systems, and Applications XI, Baltimore, MD, USA.
92. Hashemi, H. (2019, January 3–7). Large-scale monolithic optical phased arrays. Proceedings of the Optical Fiber Communication Conference, San Diego, CA, USA.10.1364/OFC.2019.Tu3E.5 ↗
93. Zhu, S., Hu, T., Li, Y., Xu, Z., Zhong, Q., Dong, Y., and Singh, N. (2019, January 12–15). CMOS-compatible integrated silicon nitride optical phase array for electrically tunable off-chip laser beam steering. Proceedings of the 2019 Electron Devices Technology and Manufacturing Conference (EDTM), Singapore.10.1109/EDTM.2019.8731179 ↗
94. Phare, C.T., Shin, M.C., Miller, S.A., Stern, B., and Lipson, M. (2018). Silicon optical phased array with high-efficiency beam formation over 180 degree field of view. arXiv.10.1364/CLEO_SI.2018.SM3I.2 ↗
95. Design considerations of silicon nitride optical phased array for visible light10.1109/JSTQE.2018.2836991 ↗
96. Two-dimensional free-space beam steering with an optical phased array on silicon-on-insulator10.1364/OE.19.021595 ↗
97. High-speed optical-beam scanning by an optical phased array using electro-optic polymer waveguides10.1109/JPHOT.2020.2981743 ↗
98. Temporal response of polymer waveguide beam scanner with thermo-optic phase-modulator array10.1364/OE.383514 ↗
99. Integrated phased array for wide-angle beam steering10.1364/OL.39.004575 ↗
100. Beam steering with ultracompact and low-power silicon resonator phase shifters10.1364/OE.27.034639 ↗