journal article·2020-04-10Open access

Planar Microwave Resonant Sensors: A Review and Recent Developments

Jonathan Muñoz-Enano, Paris Vélez, Marta Gil, Ferran Martín

Applied Sciences· Volume 10· Issue 7

Abstract

Microwave sensors based on electrically small planar resonant elements are reviewed in this paper. By virtue of the high sensitivity of such resonators to the properties of their surrounding medium, particularly the dielectric constant and the loss factor, these sensors are of special interest (although not exclusive) for dielectric characterization of solids and liquids, and for the measurement of material composition. Several sensing strategies are presented, with special emphasis on differential-mode sensors. The main advantages and limitations of such techniques are discussed, and several prototype examples are reported, mainly including sensors for measuring the dielectric properties of solids, and sensors based on microfluidics (useful for liquid characterization and liquid composition). The proposed sensors have high potential for application in real scenarios (including industrial processes and characterization of biosamples).
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Microwave and Dielectric Measurement Techniques · Acoustic Wave Resonator Technologies · Microwave Engineering and Waveguides

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

CIMITEC, Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Bellaterra, Spain

Departamento de Ingeniería Audiovisual y Comunicaciones, Universidad Politécnica de Madrid, 28031 Madrid, Spain

Funding

Agència de Gestió d'Ajusts Universitaris i de Recerca · European Regional Development Fund · Institució Catalana de Recerca i Estudis Avançats · Ministerio de Ciencia, Innovación y Universidades · Universidad Politécnica de Madrid Young Researchers Support Program

References (95)

Show source-provided references
1. A microwave resonant sensor for concentration measurements of liquid solutions10.1109/JSEN.2013.2244035 ↗
2. A generalized rectangular cavity approach for determination of complex permittivity of materials10.1109/TIM.2014.2313415 ↗
3. Wei, P., Morey, B., Dyson, T., McMahon, N., Hsu, Y.Y., Gazman, S., Klinker, L., Ives, B., Dowling, K., and Rafferty, C. (2013, January 3–6). A Conformal Sensor for Wireless Sweat Level Monitoring. Proceedings of the IEEE Sensors, Baltimore, MD, USA.10.1109/ICSENS.2013.6688376 ↗
4. Recent advances in wearable sensors for health monitoring10.1109/JSEN.2014.2357257 ↗
5. Submersible printed split-ring resonator-based sensor for thin-film detection and permittivity characterization10.1109/JSEN.2016.2538086 ↗
6. Integrated microwave power sensor10.1049/el:19951506 ↗
7. Castillo-León, J., and Svendsen, W.E. (2015). Lab-on-a-Chip Devices and Micro-Total Analysis Systems, Springer.10.1007/978-3-319-08687-3 ↗
8. Integrated broadband microwave and microfluidic sensor dedicated to bioengineering10.1109/TMTT.2009.2034226 ↗
9. A microwave and microfluidic planar resonator for efficient and accurate complex permittivity characterization of aqueous solutions10.1109/TMTT.2012.2231877 ↗
10. Microfluidic Biosensor Based on Microwave Substrate-Integrated Waveguide Cavity Resonator10.1155/2018/1324145 ↗
11. Noncontact and nonintrusive microwave-microfluidic flow sensor for energy and biomedical engineering10.1038/s41598-017-18621-2 ↗
12. Damm, C., Schüßler, M., Puentes, M., Maune, H., Maasch, M., and Jakoby, R. (2009, January 25–28). Artificial transmission lines for high sensitive microwave sensors. Proceedings of the IEEE Sensors, Christchurch, New Zealand.10.1109/ICSENS.2009.5398538 ↗
13. Ferrández-Pastor, F., García-Chamizo, J., and Nieto-Hidalgo, M. (2017). Electromagnetic differential measuring method: Application in microstrip sensors developing. Sensors, 17.10.3390/s17071650 ↗
14. An Analytical Method to Implement High Sensitivity Transmission Line Differential Sensors for Dielectric Constant Measurements
15. Mandel, C., Kubina, B., Schüßler, M., and Jakoby, R. (2011, January 9–14). Passive chipless wireless sensor for two-dimensional displacement measurement. Proceedings of the 41st European Microwave Conference, Manchester, UK.
16. Novel sensors based on the symmetry properties of split ring resonators (SRRs)10.3390/s110807545 ↗
17. Naqui, J., Durán-Sindreu, M., and Martín, F. (2012, January 17–22). On the symmetry properties of coplanar waveguides loaded with symmetric resonators: Analysis and potential applications. Proceedings of the 2012 IEEE/MTT-S International Microwave Symposium Digest, Montreal, QC, Canada.10.1109/MWSYM.2012.6258390 ↗
18. Alignment and position sensors based on split ring resonators10.3390/s120911790 ↗
19. Naqui, J., Durán-Sindreu, M., and Martín, F. (2013, January 7). Transmission lines loaded with bisymmetric resonators and applications. Proceedings of the IEEE MTT-S International Microwave Symposium Digest, Seattle, WA, USA.10.1109/MWSYM.2013.6697368 ↗
20. Displacement sensor based on diamond-shaped tapered split ring resonator10.1109/JSEN.2012.2231065 ↗
21. Rotation sensor based on horn-shaped split ring resonator10.1109/JSEN.2013.2264804 ↗
22. Transmission lines loaded with bisymmetric resonators and their application to angular displacement and velocity sensors10.1109/TMTT.2013.2285356 ↗
23. Metamaterial-inspired rotation sensor with wide dynamic range10.1109/JSEN.2014.2313625 ↗
24. Two-dimensional alignment and displacement sensor based on movable broadside-coupled split ring resonators10.1016/j.sna.2014.01.030 ↗
25. Two-dimensional displacement and alignment sensor based on reflection coefficients of open microstrip lines loaded with split ring resonators10.1049/el.2014.0572 ↗
26. Angular displacement and velocity sensors based on electric-LC (ELC) loaded microstrip lines10.1109/JSEN.2013.2295518 ↗
27. Angular displacement and velocity sensors based on coplanar waveguides (CPWs) loaded with S-shaped split ring resonators (S-SRR)10.3390/s150509628 ↗
28. Naqui, J., and Martín, F. (2016, January 22–27). Application of broadside-coupled split ring resonator (BC-SRR) loaded transmission lines to the design of rotary encoders for space applications. Proceedings of the IEEE MTT-S International Microwave Symposium, San Francisco, CA, USA.10.1109/MWSYM.2016.7540017 ↗
29. Application of split ring resonator (SRR) loaded transmission lines to the design of angular displacement and velocity sensors for space applications10.1109/TMTT.2017.2693981 ↗
30. Detecting the rotation direction in contactless angular velocity sensors implemented with rotors loaded with multiple chains of resonators10.1109/JSEN.2018.2853643 ↗
31. Puentes, M. (2014). Planar Metamaterial Based Microwave Sensor Arrays for Biomedical Analysis and Treatment, Springer.
32. High-sensitivity metamaterial-inspired sensor for microfluidic dielectric characterization10.1109/JSEN.2013.2295312 ↗
33. Metamaterial inspired microwave sensors10.1109/MMM.2011.2181448 ↗
34. Material characterization using complementary split-ring resonators10.1109/TIM.2012.2203450 ↗
35. Complementary split-ring resonators for measuring dielectric constants and loss tangents10.1109/LMWC.2014.2318900 ↗
36. Noncontact measurement of complex permittivity and thickness by using planar resonators10.1109/TMTT.2015.2503764 ↗
37. Metamaterial-based microfluidic sensor for dielectric characterization10.1016/j.sna.2012.10.027 ↗
38. Salim, A., and Lim, S. (2016). Complementary split-ring resonator-loaded microfluidic ethanol chemical sensor. Sensors, 16.10.3390/s16111802 ↗
39. Su, L., Mata-Contreras, J., Vélez, P., Fernández-Prieto, A., and Martín, F. (2018). Analytical method to estimate the complex permittivity of oil samples. Sensors, 18.10.3390/s18040984 ↗
40. Abdolrazzaghi, M., Zarifi, M.H., and Daneshmand, M. (November, January 30). Sensitivity enhancement of split ring resonator based liquid sensors. Proceedings of the IEEE Sensors.
41. Robust ultra-high resolution microwave planar sensor using fuzzy neural network approach10.1109/JSEN.2016.2631618 ↗
42. Monitoring solid particle deposition in lossy medium using planar resonator sensor10.1109/JSEN.2017.2757027 ↗
43. A microwave ring resonator sensor for early detection of breaches in pipeline coatings10.1109/TIE.2017.2733449 ↗
44. Strongly enhanced sensitivity in planar microwave sensors based on metamaterial coupling10.1109/TMTT.2018.2791942 ↗
45. Su, L., Mata-Contreras, J., Vélez, P., and Martín, F. (2017, January 20–22). Estimation of the Complex Permittivity of Liquids by means of Complementary Split Ring Resonator (CSRR) Loaded Transmission Lines. Proceedings of the IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes, Pavia, Italy.10.1109/IMWS-AMP.2017.8247398 ↗
46. Ultrahigh-Sensitivity Microwave Sensor for Microfluidic Complex Permittivity Measurement10.1109/TMTT.2019.2932737 ↗
47. Naqui, J. (2016). Symmetry Properties in Transmission Lines Loaded with Electrically Small Resonators: Circuit Modeling and Applications, Springer.10.1007/978-3-319-24566-9 ↗
48. Microwave sensors based on symmetry properties of resonator-loaded transmission lines10.1155/2015/741853 ↗
49. High-Density Microwave Encoders for Motion Control and Near-Field Chipless-RFID10.1109/JSEN.2019.2895015 ↗
50. Double-stub loaded microstrip line reader for very high data density microwave encoders10.1109/TMTT.2019.2929128 ↗
51. Naqui, J., Damm, C., Wiens, A., Jakoby, R., Su, L., and Martín, F. (2014, January 1–6). Transmission lines loaded with pairs of magnetically coupled stepped impedance resonators (SIRs): Modeling and application to microwave sensors. Proceedings of the IEEE MTT-S International Microwave Symposium, Tampa, FL, USA.10.1109/MWSYM.2014.6848494 ↗
52. Modeling metamaterial transmission lines loaded with pairs of coupled split-ring resonators10.1109/LAWP.2014.2355035 ↗
53. Su, L., Naqui, J., Mata, J., and Martín, F. (2015, January 7–12). Dual-band epsilon-negative (ENG) transmission line metamaterials based on microstrip lines loaded with pairs of coupled complementary split ring resonators (CSRRs): Modeling, analysis and applications. Proceedings of the 9th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics, Metamaterials 2015, Oxford, UK.10.1109/MetaMaterials.2015.7342428 ↗
54. Su, L., Naqui, J., Mata-Contreras, J., Vélez, P., and Martín, F. (2015, January 7–11). Transmission line metamaterials based on pairs of coupled split ring resonators (SRRs) and complementary split ring resonators (CSRR): A comparison to the light of the lumped element equivalent circuits. Proceedings of the International Conference on Electromagnetics for Advanced Applications, ICEAA 2015, Torino, Italy.10.1109/ICEAA.2015.7297242 ↗
55. Modeling and applications of metamaterial transmission lines loaded with pairs of coupled complementary split-ring resonators (CSRRs)10.1109/LAWP.2015.2435656 ↗
56. Transmission lines loaded with pairs of stepped impedance resonators: Modeling and application to differential permittivity measurements10.1109/TMTT.2016.2610423 ↗
57. Splitter/combiner microstrip sections loaded with pairs of complementary split ring resonators (CSRRs): Modeling and optimization for differential sensing applications10.1109/TMTT.2016.2623311 ↗
58. Microwave microfluidic sensor based on a microstrip splitter/combiner configuration and split ring resonators (SRRs) for dielectric characterization of liquids10.1109/JSEN.2017.2747764 ↗
59. Differential sensors using microstrip lines loaded with two split-ring resonators10.1109/JSEN.2018.2840691 ↗
60. Differential Sensor based on Electro-Inductive Wave (EIW) Transmission Lines for Dielectric Constant Measurements and Defect Detection10.1109/TAP.2019.2938609 ↗
61. Differential microfluidic sensor on printed circuit board for biological cells analysis10.1002/elps.201400524 ↗
62. Highly-sensitive microwave sensors based on open complementary split ring resonators (OCSRRs) for dielectric characterization and solute concentration measurement in liquids10.1109/ACCESS.2018.2867077 ↗
63. Split Ring Resonator-Based Microwave Fluidic Sensors for Electrolyte Concentration Measurements
64. Vélez, P., Muñoz-Enano, J., Gil, M., Mata-Contreras, J., and Martín, F. (2019). Differential Microfluidic Sensors Based on Dumbbell-Shaped Defect Ground Structures in Microstrip Technology: Analysis, Optimization, and Applications. Sensors, 19.10.3390/s19143189 ↗
65. Muñoz-Enano, J., Vélez, P., Gil, M., Mata-Contreras, J., and Martín, F. (2019, January 13–15). Microwave comparator based on defect ground structures. Proceedings of the European Microwave Conference in Central Europe, Prague, Czech Republic.
66. Vélez, P., Muñoz-Enano, J., and Martín, F. (2019, January 1–3). Electrolyte concentration measurements in DI water with 0.125 g/L resolution by means of CSRR-based structures. Proceedings of the 49th European Microwave Conference, Paris, France.10.23919/EuMC.2019.8910697 ↗
67. Muñoz-Enano, J., Vélez, P., Gil, M., Mata-Contreras, J., Grenier, K., Dubuc, D., and Martín, F. (2019, January 1–3). Microstrip Lines Loaded with Metamaterial-Inspired Resonators for Microwave Sensors/Comparators with Optimized Sensitivity. Proceedings of the 49th European Microwave Conference, Paris, France.10.23919/EuMC.2019.8910702 ↗
68. Differential-mode to common-mode conversion detector based on rat-race couplers: Analysis and application to microwave sensors and comparators10.1109/TMTT.2019.2955676 ↗
69. Muñoz-Enano, J., Vélez, P., Gil, M., and Martín, F. (2020). Microfluidic reflective-mode differential sensor based on open split ring resonators (OSRRs). Int. J. Microw. Wirel. Technol., to be published.10.1017/S1759078720000501 ↗
70. Transmission Lines Terminated with LC Resonators for Differential Permittivity Sensing10.1109/LMWC.2018.2875996 ↗
71. Microwave reflective biosensor for glucose level detection in aqueous solutions10.1016/j.sna.2019.111662 ↗
72. Differential Sensing Based on Quasi-Microstrip Mode to Slot-Mode Conversion10.1109/LMWC.2019.2939533 ↗
73. Marqués, R., Martin, F., and Sorolla, M. (2013). Metamaterials with Negative Parameters: Theory, Design, and Microwave Applications, John Wiley & Sons.
74. Martín, F. (2015). Artificial Transmission Lines for RF and Microwave Applications, John Wiley & Sons.10.1002/9781119058403 ↗
75. Electrically small resonators for planar metamaterial, microwave circuit and antenna design: A comparative analysis10.3390/app2020375 ↗
76. Compact bandpass filters using stepped impedance resonators10.1109/PROC.1979.11196 ↗
77. Implementation of shunt-connected series resonators through stepped-impedance shunt stubs: Analysis and limitations10.1049/iet-map.2010.0612 ↗
78. Magnetism from conductors and enhanced nonlinear phenomena10.1109/22.798002 ↗
79. A new LC series element for compact bandpass filter design10.1109/LMWC.2004.827836 ↗
80. Electric-field-coupled resonators for negative permittivity metamaterials10.1063/1.2166681 ↗
81. Effective negative-ε stop-band microstrip lines based on complementary split ring resonators10.1109/LMWC.2004.828029 ↗
82. Open complementary split ring resonators (OCSRRs) and their application to wideband CPW band pass filters10.1109/LMWC.2009.2015490 ↗
83. A design of the low-pass filter using the novel microstrip defected ground structure10.1109/22.899965 ↗
84. Naqui, J., Durán-Sindreu, M., and Martín, F. (2013). Differential and single-ended microstrip lines loaded with slotted magnetic-LC resonators. Int. J. Antennas Propag., 2013.10.1155/2013/640514 ↗
85. Left-handed materials composed of only S-shaped resonators10.1103/PhysRevE.70.057605 ↗
86. Artificial magnetic metamaterial design by using spiral resonators10.1103/PhysRevB.69.014402 ↗
87. Marqués, R., Baena, J.D., Martel, J., Medina, F., Falcone, F., Sorolla, M., and Martín, F. (2003, January 8–12). Novel small resonant electromagnetic particles for metamaterial and filter design. Proceedings of the Electromagnetics in Advanced Applications, Torino, Italy.
88. Role of bianisotropy in negative permeability and left-handed metamaterials10.1103/PhysRevB.65.144440 ↗
89. Vélez, A., Aznar, F., Durán-Sindreu, M., Bonache, J., and Martin, F. (September, January 30). Open complementary split ring resonators (OCSRRs): The missing particle. Proceedings of the Metamaterials 2009, London, UK.
90. Muñoz-Enano, J., Vélez, P., Herrojo, C., Gil, M., and Martín, F. (2019, January 9–13). On the Sensitivity of Microwave Sensors based on Slot Resonators and Frequency Variation. Proceedings of the International Conference on Electromagnetics in Advanced Applications (ICEAA), Granada, Spain.10.1109/ICEAA.2019.8879081 ↗
91. Microwave dielectric characterization of binary mixtures of water, methanol, and ethanol10.1063/1.471197 ↗
92. Eitel, E. (2014). Basics of rotary encoders: Overview and new technologies. Mach. Des. Mag., 7.
93. McMillan, G.K., and Considine, D.M. (1999). Process Instruments and Controls Handbook, McGraw Hill. [5th ed.].
94. Bias-tunable dual-mode ultraviolet photodetectors for photoelectric tachometer10.1063/1.4863431 ↗
95. Hogan, M.A. (2017). Pearson Reviews & Rationales: Fluids, Electrolytes, and Acid-Base Balance with Nursing Reviews & Rationales, Pearson. [4th ed.].