journal article·2026-07

Surface curvature-induced stress distribution in thin films

Y. G. Li, Z. T. Chen, H. Fang, J. H. Xiong

Applied Physics A· Volume 132· Issue 7
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Abstract

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OpenAlex topics: Metal and Thin Film Mechanics · Microstructure and mechanical properties · Copper Interconnects and Reliability

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References (35)

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