Improving functional properties in Cr2O3 thin films through annealing: a route toward sustainable materials engineering
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Abstract
Abstract Cr 2 O 3 thin films were deposited by DC magnetron sputtering under varying oxygen flow rates to investigate the influence of oxygen content and annealing effect on their structural and electronic properties. XRD and Raman confirmed pure phase Cr 2 O 3 with improved crystallinity and reduced lattice strain after annealing. XPS analysis indicated predominant Cr³⁺ states with oxygen defects that decreased upon annealing, showing chemical stability. The Schottky diode current-voltage analysis demonstrated rectification, with thermionic emission and Norde models confirming reduced ideality factor, series resistance, and a stabilized barrier height (~ 0.78 eV). The Mott-Gurney space charge limited conduction model was used to determine mobility and trap density in the deposited films. Dielectric studies revealed that the thermal annealing suppressed polarization, lowered the dielectric loss, enhanced the AC conductivity and reduced Nyquist arc diameters.
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Research context
OpenAlex topics: Pigment Synthesis and Properties · Heusler alloys: electronic and magnetic properties · Transition Metal Oxide Nanomaterials
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References (36)
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1. R. Gago, M. Vinnichenko, R. Hübner, A. Redondo-Cubero, Bonding structure and morphology of chromium oxide films grown by pulsed-DC reactive magnetron sputter deposition. J. Alloys Compd. 672, 529–535 (2016). https://doi.org/10.1016/j.jallcom.2016.02.19410.1016/j.jallcom.2016.02.194 ↗
2. S. Nie, A. Liu, Y. Meng, B. Shin, G. Liu, F. Shan, Solution-processed ternary p-type CuCrO2 semiconductor thin films and their application in transistors. J. Mater. Chem. C Mater. 6(6), 1393–1398 (2018). https://doi.org/10.1039/c7tc04810f10.1039/c7tc04810f ↗
3. S. Sundaresh, A.H. Bharath, K.B. Sundaram, Effect of annealing temperature on radio frequency sputtered p-type delafossite copper chromium oxide (CuCrO2) thin films and investigation of diode characteristics forming transparent pn-heterojunction. Coatings. 13(2) (2023). https://doi.org/10.3390/coatings1302026310.3390/coatings13020263 ↗
4. J. Crêpellière et al., Transparent conductive CuCrO2 thin films deposited by pulsed injection metal organic chemical vapor deposition: Up-scalable process technology for an improved transparency/conductivity trade-off. J. Mater. Chem. C Mater. 4, 4278–4287 (2016). https://doi.org/10.1039/c6tc00383d10.1039/c6tc00383d ↗
5. P. Lunca-Popa, J. Afonso, P. Grysan, J. Crêpellière, R. Leturcq, D. Lenoble, Tuning the electrical properties of the p-type transparent conducting oxide Cu1–xCr1+xO2 by controlled annealing. Sci. Rep. 8(1) (2018). https://doi.org/10.1038/s41598-018-25659-310.1038/s41598-018-25659-3 ↗
6. P. Makushko et al., Flexomagnetism and vertically graded Néel temperature of antiferromagnetic Cr2O3 thin films. Nat. Commun. 13(1) (2022). https://doi.org/10.1038/s41467-022-34233-510.1038/s41467-022-34233-5 ↗
7. Z. Mi et al., The effects of strain and vacancy defects on the electronic structure of Cr2O3. Comput. Mater. Sci. 144, 64–69 (2018). https://doi.org/10.1016/j.commatsci.2017.12.01210.1016/j.commatsci.2017.12.012 ↗
8. A.O.M. Alzahrani, M.S. Abdel-wahab, M. Alayash, M.S. Aida, Metals and ITO contact nature on ZnO and NiO thin films. Brazilian J. Phys. 51(4), 1159–1165 (2021). https://doi.org/10.1007/s13538-021-00905-810.1007/s13538-021-00905-8 ↗
9. P.M. Sousa, A.J. Silvestre, O. Conde, Cr2O3 thin films grown at room temperature by low pressure laser chemical vapour deposition. Thin Solid Films 519(11), 3653–3657 (2011). https://doi.org/10.1016/j.tsf.2011.01.38210.1016/j.tsf.2011.01.382 ↗
10. M. Julkarnain, J. Hossain, K.S. Sharif, K.A. Khan, Optical properties of thermally evaporated Cr2O3 thin films. Can. J. Chem. Eng. Technol. 3(4) (2012). Available: https://www.researchgate.net/publication/235692748
11. K. Al-Rashedi, M. Farooqui, G. Rabbani, Characterizing crystalline chromium oxide thin film growth by sol-gel method on glass substrates. Orient. J. Chem. 34(4), 2203–2207 (2018). https://doi.org/10.13005/ojc/340406410.13005/ojc/3404064 ↗
12. T. Jõgiaas, A. Tarre, H. Mändar, J. Kozlova, A. Tamm, Nanoindentation of chromium oxide possessing superior hardness among atomic-layer-deposited oxides. Nanomaterials. 12(1) (2022). https://doi.org/10.3390/nano1201008210.3390/nano12010082 ↗
13. D.-Y. Wang, J.-H. Lin, W.-Y. Ho, Study on chromium oxide synthesized by unbalanced magnetron sputtering. Thin Solid Films 332(1–2), 295–299, (1998). Available: https://doi.org/10.1016/S0040-6090-98-01266-8. Accessed 07 Feb 202610.1016/S0040-6090-98-01266-8 ↗
14. M.K. Khalaf, D. salman abd al-kader, and, J.M. salh, Annealing effect on structural and optical properties of Cr2O3 thin films prepared by R.F Magnetron sputtering. IOP Conf. Ser. Mater. Sci. Eng. 1105(1), 012064 (2021). https://doi.org/10.1088/1757-899x/1105/1/01206410.1088/1757-899x/1105/1/012064 ↗
15. A. Kumar et al., Jun., Study of deposition temperature effect on spray-deposited copper oxide thin films and its schottky diodes. Phys. Scr. 99(7), 075927 (2024). https://doi.org/10.1088/1402-4896/ad51b710.1088/1402-4896/ad51b7 ↗
16. S.Y. Jeong, J.B. Lee, H. Na, T.Y. Seong, Epitaxial growth of Cr2O3 thin film on Al 2O3 (0001) substrate by radio frequency magnetron sputtering combined with rapid-thermal annealing. Thin Solid Films 518(17), 4813–4816 (2010). https://doi.org/10.1016/j.tsf.2010.01.04610.1016/j.tsf.2010.01.046 ↗
17. J. Singh, V. Verma, R. Kumar, R. Kumar, Structural, optical and electrical characterization of epitaxial Cr2O3 thin film deposited by PLD. Mater. Res. Express. 6(10) (2019). https://doi.org/10.1088/2053-1591/ab354310.1088/2053-1591/ab3543 ↗
18. M. Mohammadtaheri, Q. Yang, Y. Li, J. Corona-Gomez, The effect of deposition parameters on the structure and mechanical properties of chromium oxide coatings deposited by reactive magnetron sputtering. Coatings. 8(3) (2018). https://doi.org/10.3390/coatings803011110.3390/coatings8030111 ↗
19. C. Guillén, J. Herrero, Structural changes induced by heating in sputtered NiO and Cr2O3 thin films as p-Type transparent conductive electrodes. Electr. Mater. 2(2), 49–59 (2021). https://doi.org/10.3390/electronicmat202000510.3390/electronicmat2020005 ↗
20. P.L. Qin et al., Copper-doped chromium oxide hole-transporting layer for perovskite solar cells: interface engineering and performance improvement. Adv. Mater. Interfaces. 3(14) (2016). https://doi.org/10.1002/admi.20150079910.1002/admi.201500799 ↗
21. A.G. Shard, Practical guides for x-ray photoelectron spectroscopy: quantitative XPS. J. Vacuum Sci. Technol. A 38(4) (2020). https://doi.org/10.1116/1.514139510.1116/1.5141395 ↗
22. G. Alan Sibu, V. Balasubramani, P. Gayathri, M. Aslam Manthrammel, M. Shkir, Manifesting the versatile properties of the magnesium MOS diodes for optoelectronic applications. Opt. Mater. (Amst). 164(2), 117047 (2025). https://doi.org/10.1016/j.optmat.2025.11704710.1016/j.optmat.2025.117047 ↗
23. I.Y. Erdoǧan, Ö. Güllü, Silicon MIS diodes with Cr2O3 nanofilm: Optical, morphological/structural and electronic transport properties. Appl. Surf. Sci. 256, 4185–4191 (2010). https://doi.org/10.1016/j.apsusc.2010.01.12210.1016/j.apsusc.2010.01.122 ↗
24. Y. Lee, B. Kang, S. Jung, J. Kwon, Stabilizing Schottky junction in conjugated polymer diodes enables long-term reliable radio-frequency energy harvesting on plastic. npj Flex. Electron. 8(1) (2024). https://doi.org/10.1038/s41528-024-00326-y10.1038/s41528-024-00326-y ↗
25. A. Hajibadali, M.B. Nejad, G. Farzi, Schottky diodes based on polyaniline/multi-walled carbon nanotube composites. Braz. J. Phys. 45(4), 394–398 (2015). https://doi.org/10.1007/s13538-015-0334-y10.1007/s13538-015-0334-y ↗
26. J.A. Röhr, D. Moia, S.A. Haque, T. Kirchartz, J. Nelson, Exploring the validity and limitations of the Mott–Gurney law for charge-carrier mobility determination of semiconducting thin-films. J. Phys.: Condens. Matter. 30(10), 105901 (2018). https://doi.org/10.1088/1361-648X/AAABAD10.1088/1361-648X/AAABAD ↗
27. C.P. Kwan et al., Space-charge limited conduction in epitaxial chromia films grown on elemental and oxide-based metallic substrates. AIP Adv. 9(5) (2019). https://doi.org/10.1063/1.508783210.1063/1.5087832 ↗
28. A. Fleissner, H. Schmid, C. Melzer, H. Von Seggern, Trap-controlled hole transport in small molecule organic semiconductors. Appl. Phys. Lett. 91(24) (2007). https://doi.org/10.1063/1.282044810.1063/1.2820448 ↗
29. M.M. Abdullah, F.M. Rajab, S.M. Al-Abbas, Structural and optical characterization of Cr2O3 nanostructures: Evaluation of its dielectric properties. AIP Adv. 4(2), (2014). https://doi.org/10.1063/1.486701210.1063/1.4867012 ↗
30. K.S. Hemalatha, G. Sriprakash, M.V.N. Ambika Prasad, R. Damle, K. Rukmani, Temperature dependent dielectric and conductivity studies of polyvinyl alcohol-ZnO nanocomposite films by impedance spectroscopy. J. Appl. Phys. 118(15) (2015). https://doi.org/10.1063/1.493328610.1063/1.4933286 ↗
31. P. Salunkhe, D. Kekuda, Effect of annealing temperature on the physical properties of NiO thin films and ITO/NiO/Al Schottky diodes. J. Mater. Sci.: Mater. Electron. (2022). https://doi.org/10.1007/s10854-022-08910-610.1007/s10854-022-08910-6 ↗
32. A. Zekaik, H. Benhebal, B. Benrabah, Synthesis and characterization of Cu doped chromium oxide (Cr2O3) thin films. High Temp. Mater. Process. 38(2019), 806–812 (2019). https://doi.org/10.1515/htmp-2019-003710.1515/htmp-2019-0037 ↗
33. E. Barsoukov, J.R. Macdonald (eds.), Impedance spectroscopy: theory, experiment, and applications, 2nd ed. Hoboken, NJ, USA: Wiley, 2005. https://doi.org/10.1002/0471716243.fmatter10.1002/0471716243.fmatter ↗
34. F. Rehman, L. Wang, H.B. Jin, P. Ahmad, Y. Zhao, J.B. Li, Dielectric relaxation and electrical properties of Sm0.5Bi4.5Ti3FeO15 ceramics. J. Alloys Compd. 709, 686–691 (2017). https://doi.org/10.1016/j.jallcom.2017.03.21310.1016/j.jallcom.2017.03.213 ↗
35. S. Praharaj, D. Rout, Electrical conductivity and modulus study of 0.76Na0.5Bi0.5TiO3–0.2SrTiO3–0.04BaTiO3 ceramic: a near morphotropic phase boundary composition. J. Phys. Chem. Solids 127, 52–59 (2019). https://doi.org/10.1016/J.JPCS.2018.12.00310.1016/J.JPCS.2018.12.003 ↗
36. W. Cheng et al., Existence of bipolar resistive switching with self-rectifying behavior in a p-CuCrO2/n-Si heterostructure. Thin Solid Films. 762 (2022). https://doi.org/10.1016/j.tsf.2022.13954210.1016/j.tsf.2022.139542 ↗