Preparation and tribological properties of nitrogen gradient TiN nanofilms on Si3N4 ceramic substrates
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (31)
Show source-provided references
1. A. Nino, A. Sasago, S. Sugiyama et al., Preparation of Si3N4-TaC and Si3N4-ZrC composite ceramics and their mechanical properties[J]. Int. J. Refract. Met. Hard Mater. 61, 192–200 (2016). https://doi.org/10.1016/j.ijrmhm.2016.09.01710.1016/j.ijrmhm.2016.09.017 ↗
2. F. Chen, X. Sun, B. Fang et al., Low-temperature tribological properties of Si3N4 ceramic composites incorporating nano/microscale graphene and Si3N4 whisker[J]. J. Mater. Res. Technol. 35, 325–331 (2025). https://doi.org/10.1016/j.jmrt.2025.01.05110.1016/j.jmrt.2025.01.051 ↗
3. X. Kong, X. Hu, W. Chai, In vitro & in vivo investigation of the silicon nitride ceramic hip implant’s safety and effectiveness evaluation. J. Orthop. Surg. Res. 17(1), 87 (2022). https://doi.org/10.1186/s13018-021-02884-710.1186/s13018-021-02884-7 ↗
4. N. Kumar, R.K. Satapathy, Bearings in aerospace, application, distress, and life: a review. J. Fail. Anal. Prev. 23(3), 915–947 (2023). https://doi.org/10.1007/s11668-023-01658-z10.1007/s11668-023-01658-z ↗
5. S. Lafon-Placette, K. Delbé, J. Denape et al., Tribological characterization of silicon carbide and carbon materials. J. Eur. Ceram. Soc. 35(4), 1147–1159 (2015). https://doi.org/10.1016/j.jeurceramsoc.2014.10.03810.1016/j.jeurceramsoc.2014.10.038 ↗
6. P. Panjan, A. Drnovšek, P. Terek et al., Comparative study of tribological behavior of TiN hard coatings deposited by various PVD deposition techniques. Coatings 12(3), 294 (2022). https://doi.org/10.3390/coatings1203029410.3390/coatings12030294 ↗
7. E. Soroka, B. Lyashenko, S. Qiao et al., Tribological behaviour and cutting performance of PVD-TiN coating/substrate system with discontinuous surface architecture[J]. Rare Metal Mater. Eng. 40(4), 580–584 (2011). https://doi.org/10.1016/S1875-5372(11)60028-310.1016/S1875-5372(11)60028-3 ↗
8. T.S. Kim, S.S. Park, B.T. Lee, Characterization of nano-structured TiN thin films prepared by RF magnetron sputtering. Mater. Lett. 59(29–30), 3929–3932 (2005). https://doi.org/10.1016/j.matlet.2005.07.04710.1016/j.matlet.2005.07.047 ↗
9. S. Ghasemi, A.R. Farhadizadeh, A.A. Amadeh et al., Structural and morphological properties of TiN deposited by magnetron sputtering. Surf. Topogr. Metrol. Prop. 6(4), 045003 (2018). https://doi.org/10.1088/2051-672X/aae40510.1088/2051-672X/aae405 ↗
10. J.H. Lee, A.J. Nathanael, S.I. Hong, Effect of nitrogen flow rate on the structure and properties of TiN thin films deposited onto β-type Ti-15Mo-3Nb-3Al-0.2 Si alloy substrates by reactive magnetron sputtering. Adv. Mater. Res. 557, 1998–2001 (2012). https://doi.org/10.4028/www.scientific.net/AMR.557-559.199810.4028/www.scientific.net/AMR.557-559.1998 ↗
11. J.H. Huang, K.W. Lau, G.P. Yu, Effect of nitrogen flow rate on structure and properties of nanocrystalline TiN thin films produced by unbalanced Magnetron sputtering[J]. Surf. Coat. Technol. 191(1), 17–24 (2005). https://doi.org/10.1016/j.surfcoat.2004.07.06610.1016/j.surfcoat.2004.07.066 ↗
12. D.D. Kumar, N. Kumar, S. Kalaiselvam et al., Film thickness effect and substrate dependent tribo-mechanical characteristics of titanium nitride films[J]. Surf. Interfaces. 12, 78–85 (2018). https://doi.org/10.1016/j.surfin.2018.05.00210.1016/j.surfin.2018.05.002 ↗
13. S. Zhang, F. Yan, Y. Yang et al., Effects of sputtering gas on microstructure and tribological properties of titanium nitride films. Appl. Surf. Sci. 488, 61–69 (2019). https://doi.org/10.1016/j.apsusc.2019.05.14810.1016/j.apsusc.2019.05.148 ↗
14. H. Ju, L. Yu, S. He et al., The enhancement of fracture toughness and tribological properties of the titanium nitride films by doping yttrium[J]. Surf. Coat. Technol. 321, 57–63 (2017). https://doi.org/10.1016/j.surfcoat.2017.04.05310.1016/j.surfcoat.2017.04.053 ↗
15. K. Dejun, Y. Zhang, C. Zhigang et al., Interfacial bonding strength of TiN film coated on Si3N4 ceramic Substrate[J]. J. Mater. Sci. Technol. 23(04), 487 (2007). https://doi.org/10.3321/j.issn:1005-0302.2007.04.01010.3321/j.issn:1005-0302.2007.04.010 ↗
16. L.A. Dobrzański, L.W. Żukowska, J. Mikuła et al., Structure and mechanical properties of gradient PVD coatings. J. Mater. Process. Technol. 201(1–3), 310–314 (2008). https://doi.org/10.1016/j.jmatprotec.2007.11.28310.1016/j.jmatprotec.2007.11.283 ↗
17. N. Ao, D. Liu, X. Zhang et al., The effect of residual stress and gradient nanostructure on the fretting fatigue behavior of plasma electrolytic oxidation coated Ti-6Al-4V alloy. J. Alloys Compd. 811, 152017 (2019). https://doi.org/10.1016/j.jallcom.2019.15201710.1016/j.jallcom.2019.152017 ↗
18. S.M. Jiang, H.Q. Li, J. Ma et al., High temperature corrosion behavior of a gradient nicocralysi coating part II: oxidation and hot corrosion. Corros. Sci. 52(7), 2316–2322 (2010). https://doi.org/10.1016/j.corsci.2010.03.03210.1016/j.corsci.2010.03.032 ↗
19. J.H. Yang, K.H. Chen, S.Q. Wang et al., Characteristics and performance of Ti (C, N) coatings synthesized by Magnetron sputtering technique[J]. J. Alloys Compd. 471(1–2), 162–165 (2009). https://doi.org/10.1016/j.jallcom.2008.03.05310.1016/j.jallcom.2008.03.053 ↗
20. Y. Han, B. Matthews, D. Roberts et al., Combinatorial nitrogen gradients in sputtered thin films. ACS Comb. Sci. 20(7), 436–442 (2018). https://doi.org/10.1021/acscombsci.8b0003510.1021/acscombsci.8b00035 ↗
21. V. Bonu, M. Jeevitha, P.V. Kumar et al., Ultra-thin multilayered erosion resistant ti/tin coatings with stress absorbing layers[J]. Appl. Surf. Sci. 478, 872–881 (2019). https://doi.org/10.1016/j.apsusc.2019.02.01210.1016/j.apsusc.2019.02.012 ↗
22. A. Kumar, R.S. Mulik, Improving tribological behavior of titanium nitride (TiN) hard coatings via zirconium (Zr) or vanadium (V) doping. Tribol. Int. 189, 108997 (2023). https://doi.org/10.1016/j.triboint.2023.10899710.1016/j.triboint.2023.108997 ↗
23. R.F. Zhang, S. Veprek, Metastable phases and spinodal decomposition in Ti1-xAlxN system studied by Ab initio and thermodynamic modeling, a comparison with the TiN-Si3N4 system. Mater. Sci. Eng. A 448(1–2), 111–119 (2007). https://doi.org/10.1016/j.msea.2006.10.01210.1016/j.msea.2006.10.012 ↗
24. G.M. Uddin, M. Jawad, M. Ghufran et al., Experimental investigation of tribo-mechanical and chemical properties of TiN PVD coating on titanium substrate for biomedical implants manufacturing. Int. J. Adv. Manuf. Technol. 102, 1391–1404 (2019). https://doi.org/10.1007/s00170-018-03244-210.1007/s00170-018-03244-2 ↗
25. X. Niu, G. Dong, S. Wei et al., Effects of nitrogen flow rate on the microstructure and mechanical and tribological properties of TiAlN films prepared via reactive magnetron sputtering. Ceram. Int. 49(12), 19885–19894 (2023). https://doi.org/10.1016/j.ceramint.2023.03.10810.1016/j.ceramint.2023.03.108 ↗
26. F. Silva, M.A. Tunes, P.D. Edmondson et al., Grid-assisted Magnetron sputtering deposition of nitrogen graded TiN thin films[J]. Appl. Sci. 2(5), 865 (2020). https://doi.org/10.1007/s42452-020-2617-310.1007/s42452-020-2617-3 ↗
27. H. Cao, J. Yang, W. Luo et al., Influence of film structure on the microstructure and properties of TiAlN coatings on Al-Si alloys. Mater. Charact. 189, 111996 (2022). https://doi.org/10.1016/j.matchar.2022.11199610.1016/j.matchar.2022.111996 ↗
28. X. Wu, D. Zhu, S. Bian et al., Adsorption behavior regulates the frictional response of a solid-liquid system: A case study of the ZrN-Cu/bovine serum albumin solution system[J]. Tribol. Int. 209, 110727 (2025). https://doi.org/10.1016/j.triboint.2025.11072710.1016/j.triboint.2025.110727 ↗
29. B. Li, Q. Liu, M. Chen et al., Ru-induced microstructural change in ion-plated TiN coating and its tribological properties. Surf. Coat. Technol. 354, 175–183 (2018). https://doi.org/10.1016/j.surfcoat.2018.09.02810.1016/j.surfcoat.2018.09.028 ↗
30. A.Y. Adesina, Tribological behavior of tin/TiAlN, CrN/TiAlN, and CrAlN/TiAlN coatings at elevated temperature. J. Mater. Eng. Perform. 31(8), 6404–6419 (2022). https://doi.org/10.1007/s11665-022-06722-710.1007/s11665-022-06722-7 ↗
31. W. Qin, Structural evolution mechanism on the sliding interfaces of polycrystalline diamond sliding against ceramic materials. PhD Thesis, China University of Geosciences Beijing, China (2019)