DataVXApplied Physics APaper
journal article·2025-07

Demonstration of low contact resistance in SiC using high-repetition-rate KrF excimer laser irradiation

Kaname Imokawa, Yohei Tanaka, Keita Katayama, Hisato Yabuta, Taisuke Miura, Kouji Kakizaki

Applied Physics A· Volume 131· Issue 7
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OpenAlex topics: Diamond and Carbon-based Materials Research · Silicon Carbide Semiconductor Technologies · Semiconductor materials and devices

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References (14)

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