Non-plane film and its growth mechanism by magnetron sputtering deposition on glass through via substrate

journal article·2025-04

Xinyu Zhou, Xun Zhang, Songlin Liu, Jingyang Zhang, Zhilin Cao, Zhipeng Chang, Yingliang Tian, Ruzhi Wang

Applied Physics A· Volume 131· Issue 4

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OpenAlex topics: Semiconductor materials and devices · Thin-Film Transistor Technologies · ZnO doping and properties

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