A multi-method study of femtosecond laser modification and ablation of amorphous hydrogenated carbon coatings
Source abstract
Abstract
Abstract We present a study on femtosecond laser treatment of amorphous hydrogen-containing carbon coatings (a-C:H). The coatings were deposited on silicon wafers by a plasma-assisted chemical vapour deposition (PA-CVD), resulting in two different types of material with distinct properties (referred to as “absorbing” and “semi-transparent” coatings in the following). The samples were laser-treated with single fs-laser pulses (800 nm center wavelength, 35 fs pulse duration) in the ablative regime. Through a multi-method approach using topometry, Raman spectroscopy, and spectroscopic imaging ellipsometry, we can identify zones and thresholds of different fluence dependent effects and have access to the local dielectric function. The two coating materials react significantly different upon laser treatment. We determined the (non-ablative) modification threshold fluence for the absorbing coating as $$3.6\times {10}-2$$ Jcm−2 and its ablation threshold as 0.22 Jcm−2. The semi-transparent coating does not show such a low-fluence modification but exhibits a characteristic interference-based intra-film ablation mechanism with two distinguishable ablation thresholds at 0.25 and 0.28 Jcm−2, respectively. The combination of tailored layer materials and correlative imaging spectroscopic methods delivers new insights into the behaviour of materials when treated with ultrashort-pulse laser radiation. Graphical abstract
Source: crossref · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Laser Material Processing Techniques · Laser-Ablation Synthesis of Nanoparticles
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (50)
Show source-provided references
1. J. Robertson, Diamond-like amorphous carbon. Mater. Sci. Eng.: R: Rep. 37(4–6), 129–281 (2002). https://doi.org/10.1016/s0927-796x(02)00005-010.1016/s0927-796x(02)00005-0 ↗
2. M. Hiratsuka et al., Correlation between Optical Properties and Hardness of Diamond-Like Carbon Films. J. Solid Mech. Mater. Eng. 7(2), 187–198 (2013). https://doi.org/10.1299/jmmp.7.18710.1299/jmmp.7.187 ↗
3. A. Hertwig, J. Krüger, M. Weise, U. Beck, Hydrogen-containing amorphous carbon Layers as optical materials in the near-IR spectral range. Plasma Process. Polym. 4, S76–S82 (2007). https://doi.org/10.1002/ppap.20073040610.1002/ppap.200730406 ↗
4. A. Grigonis, Ž Rutkunienė, H. Manikowski, M. Šilinskas, Laser-induced transformation of a-C: H thin films. Vacuum 83, S152–S154 (2009). https://doi.org/10.1016/j.vacuum.2009.01.05010.1016/j.vacuum.2009.01.050 ↗
5. A. Grigonis et al., Modification of amorphous a-C: H films by laser irradiation. Lithuan. J. Phys. 47(3), 343–350 (2007). https://doi.org/10.3952/lithjphys.4732110.3952/lithjphys.47321 ↗
6. J. Bonse, J. Krüger, Structuring of thin films by ultrashort laser pulses. Appl. Phys. A 129(4), 14 (2023). https://doi.org/10.1007/s00339-022-06229-x10.1007/s00339-022-06229-x ↗
7. T.V. Kononenko et al., Effects of pulse duration in laser processing of diamond-like carbon films. Diam. Relat. Mater. 14(8), 1368–1376 (2005). https://doi.org/10.1016/j.diamond.2005.02.00910.1016/j.diamond.2005.02.009 ↗
8. K. Sokolowski-Tinten et al., Short-pulse-laser-induced optical damage and fracto-emission of amorphous, diamond-like carbon films. Appl. Phys. Lett. 86(12), 121911 (2005). https://doi.org/10.1063/1.188803710.1063/1.1888037 ↗
9. T.V. Kononenko et al., Laser-induced spallation in diamond-like carbon films. Appl. Phys. A 79(3), 543–549 (2004). https://doi.org/10.1007/s00339-003-2356-510.1007/s00339-003-2356-5 ↗
10. R. Koter et al., Influence of film thickness and optical constants on femtosecond laser-induced ablation of hydrogenated amorphous carbon films. J. Optoelectron. Adv. Mater. 12(3), 663–667 (2010)
11. N. Yasumaru et al., Laser-induced graphitized periodic surface structure formed on tetrahedral amorphous carbon films. Diam. Relat. Mater. 107, 107909 (2020). https://doi.org/10.1016/j.diamond.2020.10790910.1016/j.diamond.2020.107909 ↗
12. S.M. Pimenov et al., Femtosecond-laser-ablation induced transformations in the structure and surface properties of diamond-like nanocomposite films. Appl. Surf. Sci. 509, 144907 (2020). https://doi.org/10.1016/j.apsusc.2019.14490710.1016/j.apsusc.2019.144907 ↗
13. K. Takabayashi et al., Morphology and structure of diamond-like carbon film induced by picosecond laser ablation. Appl. Phys. A 128(9), 850 (2022). https://doi.org/10.1007/s00339-022-05980-510.1007/s00339-022-05980-5 ↗
14. N. Yasumaru, K. Miyazaki, J. Kiuchi, Glassy carbon layer formed in diamond-like carbon films with femtosecond laser pulses. Appl. Phys. A 79(3), 425–427 (2004). https://doi.org/10.1007/s00339-004-2746-310.1007/s00339-004-2746-3 ↗
15. J. Budai et al., Preparation of hydrogenated amorphous carbon films from polymers by nano- and femtosecond pulsed laser deposition. Appl. Surf. Sci. 253(19), 8235–8241 (2007). https://doi.org/10.1016/j.apsusc.2007.02.13810.1016/j.apsusc.2007.02.138 ↗
16. J. Budai, S. Tóth, Z. Tóth, M. Koós, Diamond-like carbon films prepared by reactive pulsed laser deposition in hydrogen and methane ambient. Appl. Surf. Sci. 253(19), 8220–8225 (2007). https://doi.org/10.1016/j.apsusc.2007.02.13510.1016/j.apsusc.2007.02.135 ↗
17. J. Bonse et al., Femtosecond laser pulse irradiation effects on thin hydrogenated amorphous carbon layers. Appl. Phys. A 112(1), 9–14 (2012). https://doi.org/10.1007/s00339-012-7170-510.1007/s00339-012-7170-5 ↗
18. Q. Wu et al., Raman investigation of amorphous carbon in diamond film treated by laser. J. Appl. Phys. 93(1), 94–100 (2003). https://doi.org/10.1063/1.152430610.1063/1.1524306 ↗
19. J. Wang et al., Microstructure and chemical bond evolution of diamond-like carbon films machined by femtosecond laser. Appl. Surf. Sci. 340, 49–55 (2015). https://doi.org/10.1016/j.apsusc.2015.02.16910.1016/j.apsusc.2015.02.169 ↗
20. S.M. Pimenov et al., Femtosecond-laser surface modification and micropatterning of diamond-like nanocomposite films to control friction on the micro and macroscale. J. Appl. Phys. 122(14), 145301 (2017). https://doi.org/10.1063/1.499858610.1063/1.4998586 ↗
21. N.R. Arutyunyan, M.S. Komlenok, E.V. Zavedeev, S.M. Pimenov, Raman Spectroscopy of Amorphous Carbon Films Modified by Single-Pulse Irradiation of Nanosecond and Femtosecond Lasers. Phys. Status Sol. 255 (1), 1700225 (2017). https://doi.org/10.1002/pssb.20170022510.1002/pssb.201700225 ↗
22. M. Rybachuk et al., Near infrared optical materials from polymeric amorphous carbon synthesized by collisional plasma process. Appl. Phys. Lett. 96(21), 211909 (2010). https://doi.org/10.1063/1.343129210.1063/1.3431292 ↗
23. R.M.A. Azzam, Selected papers on ellipsometry, in SPIE milestone series. (SPIE Optical Engineering Press, Bellingham, WA, 1990)
24. R.M.A. Azzam, N.M. Bashara, Ellipsometry and polarized light (Oxford North-Holland, Amsterdam, 1977)
25. H. Fujiwara, Spectroscopic ellipsometry principles and applications (Wiley, NJ, 2007), p.36910.1002/9780470060193 ↗
26. M. Gioti, S. Logothetidis, The effect of substrate bias in amorphous carbon films prepared by magnetron sputtering and monitored by in-situ spectroscopic ellipsometry. Diam. Relat. Mater. 7(2–5), 444–448 (1998). https://doi.org/10.1016/s0925-9635(97)00297-510.1016/s0925-9635(97)00297-5 ↗
27. X. Zhou et al., Structural analysis of amorphous carbon films by BEMA theory based on spectroscopic ellipsometry measurement. Diam. Relat. Mater. 79, 46–59 (2017). https://doi.org/10.1016/j.diamond.2017.08.00210.1016/j.diamond.2017.08.002 ↗
28. C.M. Herzinger, B. Johs, W.A. McGahan, W. Paulson, A multi-sample, multi-wavelength, multi-angle investigation of the interface layer between silicon and thermally grown silicon dioxide. Thin Solid Films 313, 281–285 (1998). https://doi.org/10.1016/S0040-6090(97)00833-X10.1016/S0040-6090(97)00833-X ↗
29. C.M. Herzinger et al., Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation. J. Appl. Phys. 83(6), 3323–3336 (1998). https://doi.org/10.1063/1.36710110.1063/1.367101 ↗
30. G.E. Jellison, F.A. Modine, Parameterization of the optical functions of amorphous materials in the interband region (vol 69, pg 371, 1996). Appl. Phys. Lett. 69(14), 2137–2137 (1996). https://doi.org/10.1063/1.11815510.1063/1.118155 ↗
31. A.S. Ferlauto et al., Analytical model for the optical functions of amorphous semiconductors from the near-infrared to ultraviolet: Applications in thin film photovoltaics. J. Appl. Phys. 92(5), 2424–2436 (2002). https://doi.org/10.1063/1.149746210.1063/1.1497462 ↗
32. J. Bonse, S.M. Wiggins, J. Solis, T. Lippert, Phase change dynamics in a polymer thin film upon femtosecond and picosecond laser irradiation. Appl. Surf. Sci. 247(1–4), 440–446 (2005). https://doi.org/10.1016/j.apsusc.2005.01.12510.1016/j.apsusc.2005.01.125 ↗
33. J. Bonse et al. Damage mechanisms In polymers upon NIR femtosecond pulse laser irradiation: sub-threshold processes and their implications for laser safety applications. International Symposium on High Power Laser Ablation, Santa Fe, (New Mexico), 2010: p. 56-64 https://doi.org/10.1063/1.3507148.10.1063/1.3507148 ↗
34. J.M. Liu, Simple technique for measurements of pulsed gaussian-beam spot sizes. Opt. Lett. 7(5), 196–198 (1982). https://doi.org/10.1364/Ol.7.00019610.1364/Ol.7.000196 ↗
35. V.V. Kononenko, Modification of diamond surface by femtosecond laser pulses. Photonics 10(10), 1077 (2023). https://doi.org/10.3390/photonics1010107710.3390/photonics10101077 ↗
36. J. Yin et al., Ablation mechanism investigation and ablation threshold prediction of single crystal diamond irradiated by femtosecond laser. Diam. Relat. Mater. 111, 108173 (2021). https://doi.org/10.1016/j.diamond.2020.10817310.1016/j.diamond.2020.108173 ↗
37. K. Sokolowski-Tinten et al., Femtosecond laser-induced ablation of graphite. Ultrafast Phenom XII, 425–427 (2001)10.1007/978-3-642-56546-5_124 ↗
38. S. Logothetidis et al., Stability, enhancement of elastic properties and structure of multilayered amorphous carbon films. Appl. Surf. Sci. 138–139, 244–249 (1999). https://doi.org/10.1016/s0169-4332(98)00401-210.1016/s0169-4332(98)00401-2 ↗
39. P. Lemoine et al., Intrinsic mechanical properties of ultra-thin amorphous carbon layers. Appl. Surf. Sci. 253(14), 6165–6175 (2007). https://doi.org/10.1016/j.apsusc.2007.01.02810.1016/j.apsusc.2007.01.028 ↗
40. C. Casiraghi, A.C. Ferrari, J. Robertson, Raman spectroscopy of hydrogenated amorphous carbons. Phys. Rev. B 72(8), 085401 (2005). https://doi.org/10.1103/PhysRevB.72.08540110.1103/PhysRevB.72.085401 ↗
41. C. Casiraghi et al., Bonding in hydrogenated diamond-like carbon by Raman spectroscopy. Diam. Relat. Mater. 14(3–7), 1098–1102 (2005). https://doi.org/10.1016/j.diamond.2004.10.03010.1016/j.diamond.2004.10.030 ↗
42. Q. Ding et al., An explanation for laser-induced spallation effect in a-C: H films: Altered phase evolution route caused by hydrogen doping. J. Appl. Phys. 109(1), 013501 (2011). https://doi.org/10.1063/1.352822310.1063/1.3528223 ↗
43. G. Dumitru et al., Femtosecond laser ablation of diamond-like carbon films. Appl. Surf. Sci. 222(1–4), 226–233 (2004). https://doi.org/10.1016/j.apsusc.2003.08.03110.1016/j.apsusc.2003.08.031 ↗
44. A.C. Ferrari, J. Robertson, Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B 61(20), 14095–14107 (2000). https://doi.org/10.1103/PhysRevB.61.1409510.1103/PhysRevB.61.14095 ↗
45. M. Rybachuk, J.M. Bell, Electronic states of trans-polyacetylene, poly(p-phenylene vinylene) and sp-hybridised carbon species in amorphous hydrogenated carbon probed by resonant Raman scattering. Carbon 47(10), 2481–2490 (2009). https://doi.org/10.1016/j.carbon.2009.04.04910.1016/j.carbon.2009.04.049 ↗
46. M. Rybachuk, A. Hu, J.M. Bell, Resonant Raman scattering from polyacetylene and poly(p-phenylene vinylene) chains included into hydrogenated amorphous carbon. Appl. Phys. Lett. 93(5), 051904 (2008). https://doi.org/10.1063/1.296545810.1063/1.2965458 ↗
47. J.N. Hilfiker, T. Tiewald, Dielectric Function Modeling, in Spectroscopic Ellipsometry for Photovoltaics : Volume 1: Fundamental Principles and Solar Cell Characterization. ed. by R.W. Collins, H. Fujiwara (Springer International Publishing, NY, 2018), pp.115–15310.1007/978-3-319-75377-5_5 ↗
48. B. Johs, J.S. Hale, Dielectric function representation by B-splines. Phys. Status Sol. A 205(4), 715–719 (2008). https://doi.org/10.1002/pssa.20077775410.1002/pssa.200777754 ↗
49. J. Mohrmann et al., Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis. J. Vac. Sci. Technol. B 38(1), 014001 (2020). https://doi.org/10.1116/1.512611010.1116/1.5126110 ↗
50. G. Daminelli, S. Pentzien, A. Hertwig, J. Krüger, Influence of film thickness on laser ablation of hydrogenated amorphous carbon films. Appl. Phys. A 83(1), 89–94 (2005). https://doi.org/10.1007/s00339-005-3460-510.1007/s00339-005-3460-5 ↗