journal article·1988-08

High-resolution electron microscopy of Si cones formed on Ar+-bombarded Si wafers

S. Morishita, M. Tanemura, Y. Fujimoto, F. Okuyama

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Abstract

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OpenAlex topics: Silicon and Solar Cell Technologies · Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis

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References (26)

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14. S. Morishita, F. Okuyama: Unpublished
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26. P.S. Wagner: Whisker Technology, ed. by A.P. Levitt (Wiley, New York 1970) Chap. 3