Simultaneous formation of contacts and diffusion barriers for VLSI by rapid thermal silicidation of TiW

journal article·1990-12

H. Norstr�m, K. Maex, J. Vanhellemont, G. Brijs, W. Vandervorst, U. Smith

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OpenAlex topics: Semiconductor materials and interfaces · Intermetallics and Advanced Alloy Properties · Silicon and Solar Cell Technologies

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1. J.M. Harris, S.S. Lau, M.-A. Nicolet, R.S. Nowicki: J. Electrochem. Soc. 123, 120 (1976)10.1149/1.2132743 ↗

2. P.B. Ghate, J.C. Blair, C.R. Fuller, G.E. McGuire: Thin Solid Films 53, 117 (1978)10.1016/0040-6090(78)90024-X ↗

3. S.S. Cohen, M.J. Kim, B. Gorowitz, R. Saia, T.F. McNelly: Appl. Phys. Lett. 45, 414 (1984)10.1063/1.95241 ↗

4. M.J. Kim, D.M. Brown, S.S. Cohen, P. Picante, B. Gorowitz: IEEE Trans. ED-32, 1328 (1985)10.1109/T-ED.1985.22119 ↗

5. R.A.M. Wolters, A.J.M. Mellissen: Solid State Technol. 29, 131 (1986)

6. A. Lindberg, M. Ostling, H. Norstrom, U. Wennstrom: Proc. 17th ESSDERC-87 (1987) p. 191

7. J.Y.-T. Chen, D.B. Rensch: IEEE Trans. ED-30, 1542 (1983)10.1109/T-ED.1983.21335 ↗

8. P. Wiklund, U. Wennstrom, H. Norstrom, I. Suni, A. Lindberg: J. de Phys. 49, C4?489 (1988)

9. B.K. Mueller, T.S. Kalkur: Proc. Symp. on Rel. Semicond. Dev., Electrochem. Soc. Proc. 89-6, ed. by H.S. Rathore, G.C. Schwartz (1989) p. 289

10. A. Romano, J. Vanhellemont, H. Bender, J.R. Morante: Ultra microscopy 31, 183 (1989)10.1016/0304-3991(89)90212-X ↗

11. P. Gas, F.J. Tardy, F.M. d'Heurle: J. Appl. Phys. 60, 193 (1986)10.1063/1.337679 ↗

12. S.E. Babcock, K.N. Tu: J. Appl. Phys. 53, 6898 (1982)10.1063/1.330031 ↗

13. C.M. Osburn, T. Brat, D. Sharma, D. Griffis, S. Corcoran, S. Lin, W.-K. Chu, N. Parikh: J. Electrochem. Soc. 135, 1490 (1988)10.1149/1.2096041 ↗

14. F.M. d'Heurle, C.S. Petersson, M.Y. Tsai: J. Appl. Phys. 51, 5976 (1980)10.1063/1.327517 ↗

15. J. Torres, J.C. Oberlin, G. Bomchil, A. Perio, D. Levy, A. Saulnier, J.P. Ponpon, R. Stuck: Proc. 17th ESSDERC 1987, Bologna, Italy (1987) p. 197

16. J. Torres, J.C. Oberlin, R. Stuck, N. Bourhila, J. Palleau, G. Goltz, G. Bomchil: Appl. Surf. Sci. 38, 186 (1989)10.1016/0169-4332(89)90536-9 ↗

17. A. Kohlhase, M. Mandl, W. Pamler: J. Appl. Phys. 65, 2464 (1989)10.1063/1.342816 ↗