The influence of deep levels on the temperature coefficient of ion-implanted resistive layers in silicon
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OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design
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References (9)
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4. H. Runge: Appl. Phys.8, 43 (1975)10.1007/BF00883668 ↗
5. H. Runge: InIon Implantation in Semiconductors, ed. by S. Namba, (Plenum Press, New York: 1975)
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7. I.W. Mayer, L. Eriksson, I.A. Davies: InIon Implantation in Semiconductors (Academic Press New York: 1970)
8. M. Schulz: Appl. Phys.4, 91 (1974)10.1007/BF00884263 ↗
9. S.M. Sze:Physics of Semiconductor Devices (J. Wiley and Sons, New York 1969)