Models for thermal dissociation of silane on a polysilicon surface
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OpenAlex topics: Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies · Nanowire Synthesis and Applications
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References (15)
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1. L. Eckertova: Physics of Thin Films (Plenum, New York 1986)
2. Laser-Controlled Chemical Processing of Surfaces, Materials Research Society Symposium Proceedings, Vol. 29, ed. by A.W. Johnson, D.J. Ehrlich, H.R. Schlossberg (Springer, Berlin, Heidelberg 1986)
3. D. Bäuerle: Chemical Processing With Lasers, Springer Ser. Mater. Sci., Vol. 1 (Springer, Berlin, Heidelberg 1986)10.1007/978-3-662-02505-5 ↗
4. M.E. Coltrin, R.J. Kee, A. Miller: J. Electrochem. Soc. 131, 425 (1984); 133, 1206 (1986)10.1149/1.2115598 ↗
5. R.J. Buss, P. Ho, W.G. Breiland, M.E. Coltrin: J. Appl. Phys. 63, 2808 (1988)10.1063/1.340982 ↗
6. R.F.C. Farrow: J. Electrochem. Soc. 121, 899 (1974)10.1149/1.2401950 ↗
7. M.K. Farnaam, D.R. Olander: Surf. Sci. 145, 390 (1984)10.1016/0039-6028(84)90090-6 ↗
8. T.J. Donahue, R. Reif: J. Electrochem. Soc. 133, 1691 (1986)10.1149/1.2108995 ↗
9. S.M. Gates, C.M. Greenlief, D.B. Beach, R.R. Kunz: Chem. Phys. Lett. 154, 505 (1989)10.1016/0009-2614(89)87141-6 ↗
10. The NAG Fortran Library, Mark 13 (The Numerical Algorithms Group Limited, Oxford, UK 1988)
11. J. Doppelbauer, D. Bäuerle: In Interfaces Under Laser Irradiation, NATO ASI Series E No. 134, ed. by L.D. Laude, D. Bäuerle, M. Wautelet (Nijhof, Dordrecht 1987)
12. D.E. Kotecki, I.P. Herman: J. Appl. Phys. 64, 4920 (1988)10.1063/1.342442 ↗
13. K.K. Gleason, K.S. Wang, M.K. Chen, J.A. Reimer: J. Appl. Phys. 61, 2866 (1987)10.1063/1.337882 ↗
14. M.J. McGaughey, M.J. Kushner: J. Appl. Phys. 65, 186 (1988)10.1063/1.342568 ↗
15. K. Sinniah, M.G., Sherman, L.B., Lewis, W.H. Weinberg, J.T. Yates, Jr., K.C. Janda: Phys. Rev. Lett. 62, 567 (1989)10.1103/PhysRevLett.62.567 ↗