journal article·2011-02

The rapid prototyping of textured amorphous surfaces for the graphoepitaxial deposition of CdTe films using focused ion beam lithography

S. Neretina, R. A. Hughes, G. Stortz, J. S. Preston, P. Mascher

Applied Physics A· Volume 102· Issue 2
Publisher page

Abstract

Cadmium telluride films deposited on amorphous substrates exhibit a grain structure characterized by [111]-oriented grains, but where the in-plane grain orientation is randomized due to the absence of epitaxy. Here, we explore the viability of promoting an in-plane grain alignment through graphoepitaxy. Fifteen different substrate surface textures were fabricated using focused ion beam lithography. This approach allows for the side-by-side deposition of surface textures where both the areal extent and depth of the surface features are varied in a systematic manner. CdTe films deposited overtop these textures show grain structures with dramatic variations, revealing that particular length scales have the most pronounced effect on the grain structure.
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OpenAlex topics: Quantum Dots Synthesis And Properties · Block Copolymer Self-Assembly · Chalcogenide Semiconductor Thin Films

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