journal article·1995-07-01

Optical absorption and electronic transport in ion-implantation-doped polycrystalline SiC films

W. Hellmich, G. M�ller, G. Kr�tz, G. Derst, S. Kalbitzer

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Abstract

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Research context

OpenAlex topics: Silicon Carbide Semiconductor Technologies · Advanced ceramic materials synthesis · Copper Interconnects and Reliability

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