X-ray studies of dislocations in multi-layer Cu films
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Abstract
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (6)
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4. Y. Wang, Z. Zuang: Appl. Phys. A35, 109 (1984)
5. S.K. Halder, S. Sen, S.P. Sen Gupta: J. Phys. D9, 1867 (1976)
6. A. Gangulee: J. Appl. Phys.43, 867 (1972)10.1063/1.1661296 ↗