Raman scattering in ion-implanted silicon exposed to rf-plasma treatment

journal article·1990-11

V. V. Artamonov, M.Ya. Valakh, V. S. Lysenko, A. N. Nazarov, V. V. Streltchuk

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence

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